1/7/2013	8:38:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2013	8:38:10 AM	Recipe started at 8:38 AM
1/7/2013	8:38:10 AM	Helium valve closed
1/7/2013	8:38:10 AM	H2 valve closed
1/7/2013	8:38:10 AM	BCl3 valve closed
1/7/2013	8:38:10 AM	PH3 valve closed
1/7/2013	8:38:10 AM	SiCl4 pre valve closed
1/7/2013	8:38:10 AM	SiCl4 post valve closed
1/7/2013	8:38:10 AM	Main Vac valve closed
1/7/2013	8:38:10 AM	Bypass valve closed
1/7/2013	8:38:10 AM	Bubbler valve closed
1/7/2013	8:38:10 AM	Helium MFC set to  0.000000
1/7/2013	8:38:10 AM	H2 MFC set to  0.000000
1/7/2013	8:38:10 AM	BCl3 MFC set to  0.000000
1/7/2013	8:38:10 AM	PH3 MFC set to  0.000000
1/7/2013	8:38:10 AM	SiCl4 MFC set to  0.000000
1/7/2013	8:38:10 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	8:38:10 AM	Tube furnace set to 0
1/7/2013	8:38:13 AM	H2 valve closed
1/7/2013	8:38:13 AM	BCl3 valve closed
1/7/2013	8:38:13 AM	PH3 valve closed
1/7/2013	8:38:13 AM	SiCl4 pre valve closed
1/7/2013	8:38:13 AM	SiCl4 post valve closed
1/7/2013	8:38:13 AM	Main Vac valve closed
1/7/2013	8:38:13 AM	Bypass valve closed
1/7/2013	8:38:13 AM	Bubbler valve closed
1/7/2013	8:38:13 AM	Helium valve opened
1/7/2013	8:38:13 AM	Helium MFC set to  500.000000
1/7/2013	8:38:13 AM	H2 MFC set to  0.000000
1/7/2013	8:38:13 AM	BCl3 MFC set to  0.000000
1/7/2013	8:38:13 AM	PH3 MFC set to  0.000000
1/7/2013	8:38:13 AM	SiCl4 MFC set to  0.000000
1/7/2013	8:38:13 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	8:38:13 AM	Tube furnace set to 0
1/7/2013	8:39:26 AM	Helium valve closed
1/7/2013	8:39:26 AM	H2 valve closed
1/7/2013	8:39:26 AM	BCl3 valve closed
1/7/2013	8:39:26 AM	PH3 valve closed
1/7/2013	8:39:26 AM	SiCl4 pre valve closed
1/7/2013	8:39:26 AM	SiCl4 post valve closed
1/7/2013	8:39:26 AM	Main Vac valve closed
1/7/2013	8:39:26 AM	Bypass valve closed
1/7/2013	8:39:26 AM	Bubbler valve closed
1/7/2013	8:39:26 AM	Helium MFC set to  0.000000
1/7/2013	8:39:26 AM	H2 MFC set to  0.000000
1/7/2013	8:39:26 AM	BCl3 MFC set to  0.000000
1/7/2013	8:39:26 AM	PH3 MFC set to  0.000000
1/7/2013	8:39:26 AM	SiCl4 MFC set to  0.000000
1/7/2013	8:39:26 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	8:39:27 AM	Tube furnace set to 0
1/7/2013	8:39:28 AM	Run finished at 8:39 AM
1/7/2013	8:39:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2013	9:24:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2013	9:24:04 AM	Recipe started at 9:24 AM
1/7/2013	9:24:04 AM	Helium valve closed
1/7/2013	9:24:04 AM	H2 valve closed
1/7/2013	9:24:04 AM	BCl3 valve closed
1/7/2013	9:24:04 AM	PH3 valve closed
1/7/2013	9:24:04 AM	SiCl4 pre valve closed
1/7/2013	9:24:04 AM	SiCl4 post valve closed
1/7/2013	9:24:04 AM	Main Vac valve closed
1/7/2013	9:24:04 AM	Bubbler valve closed
1/7/2013	9:24:04 AM	Bypass valve opened
1/7/2013	9:24:04 AM	Helium MFC set to  0.000000
1/7/2013	9:24:04 AM	H2 MFC set to  0.000000
1/7/2013	9:24:04 AM	BCl3 MFC set to  0.000000
1/7/2013	9:24:04 AM	PH3 MFC set to  0.000000
1/7/2013	9:24:04 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:24:04 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:24:04 AM	Tube furnace set to 0
1/7/2013	9:25:24 AM	Helium valve closed
1/7/2013	9:25:24 AM	H2 valve closed
1/7/2013	9:25:24 AM	BCl3 valve closed
1/7/2013	9:25:24 AM	PH3 valve closed
1/7/2013	9:25:24 AM	SiCl4 pre valve closed
1/7/2013	9:25:24 AM	SiCl4 post valve closed
1/7/2013	9:25:24 AM	Main Vac valve closed
1/7/2013	9:25:24 AM	Bubbler valve closed
1/7/2013	9:25:24 AM	Bypass valve opened
1/7/2013	9:25:24 AM	Helium MFC set to  0.000000
1/7/2013	9:25:24 AM	H2 MFC set to  0.000000
1/7/2013	9:25:24 AM	BCl3 MFC set to  0.000000
1/7/2013	9:25:24 AM	PH3 MFC set to  0.000000
1/7/2013	9:25:24 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:25:24 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:25:25 AM	Tube furnace set to 0
1/7/2013	9:26:25 AM	Helium valve closed
1/7/2013	9:26:25 AM	H2 valve closed
1/7/2013	9:26:25 AM	BCl3 valve closed
1/7/2013	9:26:25 AM	PH3 valve closed
1/7/2013	9:26:25 AM	SiCl4 pre valve closed
1/7/2013	9:26:25 AM	SiCl4 post valve closed
1/7/2013	9:26:25 AM	Bypass valve closed
1/7/2013	9:26:25 AM	Bubbler valve closed
1/7/2013	9:26:25 AM	Main Vac valve opened
1/7/2013	9:26:25 AM	Helium MFC set to  0.000000
1/7/2013	9:26:25 AM	H2 MFC set to  0.000000
1/7/2013	9:26:25 AM	BCl3 MFC set to  0.000000
1/7/2013	9:26:25 AM	PH3 MFC set to  0.000000
1/7/2013	9:26:25 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:26:25 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:26:25 AM	Tube furnace set to 0
1/7/2013	9:26:26 AM	Run finished at 9:26 AM
1/7/2013	9:26:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2013	9:26:31 AM	Tube furnace set to 100
1/7/2013	9:26:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/7/2013	9:27:00 AM	Recipe started at 9:27 AM
1/7/2013	9:27:00 AM	Helium valve closed
1/7/2013	9:27:00 AM	H2 valve closed
1/7/2013	9:27:00 AM	BCl3 valve closed
1/7/2013	9:27:00 AM	PH3 valve closed
1/7/2013	9:27:00 AM	SiCl4 pre valve closed
1/7/2013	9:27:00 AM	SiCl4 post valve closed
1/7/2013	9:27:00 AM	Main Vac valve closed
1/7/2013	9:27:00 AM	Bubbler valve closed
1/7/2013	9:27:00 AM	Bypass valve opened
1/7/2013	9:27:00 AM	Helium MFC set to  0.000000
1/7/2013	9:27:00 AM	H2 MFC set to  0.000000
1/7/2013	9:27:00 AM	BCl3 MFC set to  0.000000
1/7/2013	9:27:00 AM	PH3 MFC set to  0.000000
1/7/2013	9:27:00 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:27:00 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:27:00 AM	Tube furnace set to 0
1/7/2013	9:27:00 AM	Helium valve closed
1/7/2013	9:27:00 AM	H2 valve closed
1/7/2013	9:27:00 AM	BCl3 valve closed
1/7/2013	9:27:00 AM	PH3 valve closed
1/7/2013	9:27:00 AM	SiCl4 pre valve closed
1/7/2013	9:27:00 AM	SiCl4 post valve closed
1/7/2013	9:27:00 AM	Main Vac valve closed
1/7/2013	9:27:00 AM	Bubbler valve closed
1/7/2013	9:27:00 AM	Bypass valve opened
1/7/2013	9:27:00 AM	Helium MFC set to  0.000000
1/7/2013	9:27:00 AM	H2 MFC set to  0.000000
1/7/2013	9:27:00 AM	BCl3 MFC set to  0.000000
1/7/2013	9:27:00 AM	PH3 MFC set to  0.000000
1/7/2013	9:27:00 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:27:00 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:27:01 AM	Tube furnace set to 0
1/7/2013	9:27:14 AM	Helium valve closed
1/7/2013	9:27:14 AM	H2 valve closed
1/7/2013	9:27:14 AM	BCl3 valve closed
1/7/2013	9:27:14 AM	PH3 valve closed
1/7/2013	9:27:14 AM	SiCl4 pre valve closed
1/7/2013	9:27:14 AM	SiCl4 post valve closed
1/7/2013	9:27:14 AM	Bypass valve closed
1/7/2013	9:27:14 AM	Bubbler valve closed
1/7/2013	9:27:14 AM	Main Vac valve opened
1/7/2013	9:27:14 AM	Helium MFC set to  0.000000
1/7/2013	9:27:14 AM	H2 MFC set to  0.000000
1/7/2013	9:27:14 AM	BCl3 MFC set to  0.000000
1/7/2013	9:27:14 AM	PH3 MFC set to  0.000000
1/7/2013	9:27:14 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:27:14 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:27:15 AM	Tube furnace set to 0
1/7/2013	9:27:45 AM	H2 valve closed
1/7/2013	9:27:45 AM	BCl3 valve closed
1/7/2013	9:27:45 AM	PH3 valve closed
1/7/2013	9:27:45 AM	SiCl4 pre valve closed
1/7/2013	9:27:45 AM	SiCl4 post valve closed
1/7/2013	9:27:45 AM	Bypass valve closed
1/7/2013	9:27:45 AM	Bubbler valve closed
1/7/2013	9:27:45 AM	Helium valve opened
1/7/2013	9:27:45 AM	Main Vac valve opened
1/7/2013	9:27:45 AM	Helium MFC set to  20.000000
1/7/2013	9:27:45 AM	H2 MFC set to  0.000000
1/7/2013	9:27:45 AM	BCl3 MFC set to  0.000000
1/7/2013	9:27:45 AM	PH3 MFC set to  0.000000
1/7/2013	9:27:45 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:27:45 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:27:45 AM	Tube furnace set to 0
1/7/2013	9:28:15 AM	Helium valve closed
1/7/2013	9:28:15 AM	H2 valve closed
1/7/2013	9:28:15 AM	BCl3 valve closed
1/7/2013	9:28:15 AM	PH3 valve closed
1/7/2013	9:28:15 AM	SiCl4 pre valve closed
1/7/2013	9:28:15 AM	SiCl4 post valve closed
1/7/2013	9:28:15 AM	Bypass valve closed
1/7/2013	9:28:15 AM	Bubbler valve closed
1/7/2013	9:28:15 AM	Main Vac valve opened
1/7/2013	9:28:15 AM	Helium MFC set to  0.000000
1/7/2013	9:28:15 AM	H2 MFC set to  0.000000
1/7/2013	9:28:15 AM	BCl3 MFC set to  0.000000
1/7/2013	9:28:15 AM	PH3 MFC set to  0.000000
1/7/2013	9:28:15 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:28:15 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:28:15 AM	Tube furnace set to 0
1/7/2013	9:28:45 AM	H2 valve closed
1/7/2013	9:28:45 AM	BCl3 valve closed
1/7/2013	9:28:45 AM	PH3 valve closed
1/7/2013	9:28:45 AM	SiCl4 pre valve closed
1/7/2013	9:28:45 AM	SiCl4 post valve closed
1/7/2013	9:28:45 AM	Bypass valve closed
1/7/2013	9:28:45 AM	Bubbler valve closed
1/7/2013	9:28:45 AM	Helium valve opened
1/7/2013	9:28:45 AM	Main Vac valve opened
1/7/2013	9:28:45 AM	Helium MFC set to  20.000000
1/7/2013	9:28:45 AM	H2 MFC set to  0.000000
1/7/2013	9:28:45 AM	BCl3 MFC set to  0.000000
1/7/2013	9:28:45 AM	PH3 MFC set to  0.000000
1/7/2013	9:28:45 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:28:45 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:28:45 AM	Tube furnace set to 0
1/7/2013	9:29:15 AM	Helium valve closed
1/7/2013	9:29:15 AM	H2 valve closed
1/7/2013	9:29:15 AM	BCl3 valve closed
1/7/2013	9:29:15 AM	PH3 valve closed
1/7/2013	9:29:15 AM	SiCl4 pre valve closed
1/7/2013	9:29:15 AM	SiCl4 post valve closed
1/7/2013	9:29:15 AM	Bypass valve closed
1/7/2013	9:29:15 AM	Bubbler valve closed
1/7/2013	9:29:15 AM	Main Vac valve opened
1/7/2013	9:29:15 AM	Helium MFC set to  0.000000
1/7/2013	9:29:15 AM	H2 MFC set to  0.000000
1/7/2013	9:29:15 AM	BCl3 MFC set to  0.000000
1/7/2013	9:29:15 AM	PH3 MFC set to  0.000000
1/7/2013	9:29:15 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:29:15 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:29:15 AM	Tube furnace set to 0
1/7/2013	9:29:45 AM	H2 valve closed
1/7/2013	9:29:45 AM	BCl3 valve closed
1/7/2013	9:29:46 AM	PH3 valve closed
1/7/2013	9:29:46 AM	SiCl4 pre valve closed
1/7/2013	9:29:46 AM	SiCl4 post valve closed
1/7/2013	9:29:46 AM	Bypass valve closed
1/7/2013	9:29:46 AM	Bubbler valve closed
1/7/2013	9:29:46 AM	Helium valve opened
1/7/2013	9:29:46 AM	Main Vac valve opened
1/7/2013	9:29:46 AM	Helium MFC set to  20.000000
1/7/2013	9:29:46 AM	H2 MFC set to  0.000000
1/7/2013	9:29:46 AM	BCl3 MFC set to  0.000000
1/7/2013	9:29:46 AM	PH3 MFC set to  0.000000
1/7/2013	9:29:46 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:29:46 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:29:46 AM	Tube furnace set to 0
1/7/2013	9:30:16 AM	Helium valve closed
1/7/2013	9:30:16 AM	H2 valve closed
1/7/2013	9:30:16 AM	BCl3 valve closed
1/7/2013	9:30:16 AM	PH3 valve closed
1/7/2013	9:30:16 AM	SiCl4 pre valve closed
1/7/2013	9:30:16 AM	SiCl4 post valve closed
1/7/2013	9:30:16 AM	Bypass valve closed
1/7/2013	9:30:16 AM	Bubbler valve closed
1/7/2013	9:30:16 AM	Main Vac valve opened
1/7/2013	9:30:16 AM	Helium MFC set to  0.000000
1/7/2013	9:30:16 AM	H2 MFC set to  0.000000
1/7/2013	9:30:16 AM	BCl3 MFC set to  0.000000
1/7/2013	9:30:16 AM	PH3 MFC set to  0.000000
1/7/2013	9:30:16 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:30:16 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:30:16 AM	Tube furnace set to 0
1/7/2013	9:30:46 AM	H2 valve closed
1/7/2013	9:30:46 AM	BCl3 valve closed
1/7/2013	9:30:46 AM	PH3 valve closed
1/7/2013	9:30:46 AM	SiCl4 pre valve closed
1/7/2013	9:30:46 AM	SiCl4 post valve closed
1/7/2013	9:30:46 AM	Bypass valve closed
1/7/2013	9:30:46 AM	Bubbler valve closed
1/7/2013	9:30:46 AM	Helium valve opened
1/7/2013	9:30:46 AM	Main Vac valve opened
1/7/2013	9:30:46 AM	Helium MFC set to  20.000000
1/7/2013	9:30:46 AM	H2 MFC set to  0.000000
1/7/2013	9:30:46 AM	BCl3 MFC set to  0.000000
1/7/2013	9:30:46 AM	PH3 MFC set to  0.000000
1/7/2013	9:30:46 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:30:46 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:30:46 AM	Tube furnace set to 0
1/7/2013	9:31:16 AM	Helium valve closed
1/7/2013	9:31:16 AM	H2 valve closed
1/7/2013	9:31:16 AM	BCl3 valve closed
1/7/2013	9:31:16 AM	PH3 valve closed
1/7/2013	9:31:16 AM	SiCl4 pre valve closed
1/7/2013	9:31:16 AM	SiCl4 post valve closed
1/7/2013	9:31:16 AM	Bypass valve closed
1/7/2013	9:31:16 AM	Bubbler valve closed
1/7/2013	9:31:16 AM	Main Vac valve opened
1/7/2013	9:31:16 AM	Helium MFC set to  0.000000
1/7/2013	9:31:16 AM	H2 MFC set to  0.000000
1/7/2013	9:31:16 AM	BCl3 MFC set to  0.000000
1/7/2013	9:31:16 AM	PH3 MFC set to  0.000000
1/7/2013	9:31:16 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:31:16 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:31:16 AM	Tube furnace set to 0
1/7/2013	9:31:46 AM	H2 valve closed
1/7/2013	9:31:46 AM	BCl3 valve closed
1/7/2013	9:31:46 AM	PH3 valve closed
1/7/2013	9:31:46 AM	SiCl4 pre valve closed
1/7/2013	9:31:46 AM	SiCl4 post valve closed
1/7/2013	9:31:46 AM	Bypass valve closed
1/7/2013	9:31:46 AM	Bubbler valve closed
1/7/2013	9:31:47 AM	Helium valve opened
1/7/2013	9:31:47 AM	Main Vac valve opened
1/7/2013	9:31:47 AM	Helium MFC set to  20.000000
1/7/2013	9:31:47 AM	H2 MFC set to  0.000000
1/7/2013	9:31:47 AM	BCl3 MFC set to  0.000000
1/7/2013	9:31:47 AM	PH3 MFC set to  0.000000
1/7/2013	9:31:47 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:31:47 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:31:47 AM	Tube furnace set to 0
1/7/2013	9:32:17 AM	Helium valve closed
1/7/2013	9:32:17 AM	H2 valve closed
1/7/2013	9:32:17 AM	BCl3 valve closed
1/7/2013	9:32:17 AM	PH3 valve closed
1/7/2013	9:32:17 AM	SiCl4 pre valve closed
1/7/2013	9:32:17 AM	SiCl4 post valve closed
1/7/2013	9:32:17 AM	Bypass valve closed
1/7/2013	9:32:17 AM	Bubbler valve closed
1/7/2013	9:32:17 AM	Main Vac valve opened
1/7/2013	9:32:17 AM	Helium MFC set to  0.000000
1/7/2013	9:32:17 AM	H2 MFC set to  0.000000
1/7/2013	9:32:17 AM	BCl3 MFC set to  0.000000
1/7/2013	9:32:17 AM	PH3 MFC set to  0.000000
1/7/2013	9:32:17 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:32:17 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:32:17 AM	Tube furnace set to 0
1/7/2013	9:32:47 AM	H2 valve closed
1/7/2013	9:32:47 AM	BCl3 valve closed
1/7/2013	9:32:47 AM	PH3 valve closed
1/7/2013	9:32:47 AM	SiCl4 pre valve closed
1/7/2013	9:32:47 AM	SiCl4 post valve closed
1/7/2013	9:32:47 AM	Bypass valve closed
1/7/2013	9:32:47 AM	Bubbler valve closed
1/7/2013	9:32:47 AM	Helium valve opened
1/7/2013	9:32:47 AM	Main Vac valve opened
1/7/2013	9:32:47 AM	Helium MFC set to  20.000000
1/7/2013	9:32:47 AM	H2 MFC set to  0.000000
1/7/2013	9:32:47 AM	BCl3 MFC set to  0.000000
1/7/2013	9:32:47 AM	PH3 MFC set to  0.000000
1/7/2013	9:32:47 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:32:47 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:32:47 AM	Tube furnace set to 0
1/7/2013	9:33:17 AM	Helium valve closed
1/7/2013	9:33:17 AM	H2 valve closed
1/7/2013	9:33:17 AM	BCl3 valve closed
1/7/2013	9:33:17 AM	PH3 valve closed
1/7/2013	9:33:17 AM	SiCl4 pre valve closed
1/7/2013	9:33:17 AM	SiCl4 post valve closed
1/7/2013	9:33:17 AM	Bypass valve closed
1/7/2013	9:33:17 AM	Bubbler valve closed
1/7/2013	9:33:17 AM	Main Vac valve opened
1/7/2013	9:33:17 AM	Helium MFC set to  0.000000
1/7/2013	9:33:17 AM	H2 MFC set to  0.000000
1/7/2013	9:33:17 AM	BCl3 MFC set to  0.000000
1/7/2013	9:33:17 AM	PH3 MFC set to  0.000000
1/7/2013	9:33:17 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:33:17 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:33:17 AM	Tube furnace set to 0
1/7/2013	9:33:47 AM	H2 valve closed
1/7/2013	9:33:47 AM	BCl3 valve closed
1/7/2013	9:33:47 AM	PH3 valve closed
1/7/2013	9:33:47 AM	SiCl4 pre valve closed
1/7/2013	9:33:47 AM	SiCl4 post valve closed
1/7/2013	9:33:47 AM	Bypass valve closed
1/7/2013	9:33:47 AM	Bubbler valve closed
1/7/2013	9:33:47 AM	Helium valve opened
1/7/2013	9:33:47 AM	Main Vac valve opened
1/7/2013	9:33:47 AM	Helium MFC set to  20.000000
1/7/2013	9:33:47 AM	H2 MFC set to  0.000000
1/7/2013	9:33:48 AM	BCl3 MFC set to  0.000000
1/7/2013	9:33:48 AM	PH3 MFC set to  0.000000
1/7/2013	9:33:48 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:33:48 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:33:48 AM	Tube furnace set to 0
1/7/2013	9:34:18 AM	Helium valve closed
1/7/2013	9:34:18 AM	H2 valve closed
1/7/2013	9:34:18 AM	BCl3 valve closed
1/7/2013	9:34:18 AM	PH3 valve closed
1/7/2013	9:34:18 AM	SiCl4 pre valve closed
1/7/2013	9:34:18 AM	SiCl4 post valve closed
1/7/2013	9:34:18 AM	Bypass valve closed
1/7/2013	9:34:18 AM	Bubbler valve closed
1/7/2013	9:34:18 AM	Main Vac valve opened
1/7/2013	9:34:18 AM	Helium MFC set to  0.000000
1/7/2013	9:34:18 AM	H2 MFC set to  0.000000
1/7/2013	9:34:18 AM	BCl3 MFC set to  0.000000
1/7/2013	9:34:18 AM	PH3 MFC set to  0.000000
1/7/2013	9:34:18 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:34:18 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:34:18 AM	Tube furnace set to 0
1/7/2013	9:34:48 AM	H2 valve closed
1/7/2013	9:34:48 AM	BCl3 valve closed
1/7/2013	9:34:48 AM	PH3 valve closed
1/7/2013	9:34:48 AM	SiCl4 pre valve closed
1/7/2013	9:34:48 AM	SiCl4 post valve closed
1/7/2013	9:34:48 AM	Bypass valve closed
1/7/2013	9:34:48 AM	Bubbler valve closed
1/7/2013	9:34:48 AM	Helium valve opened
1/7/2013	9:34:48 AM	Main Vac valve opened
1/7/2013	9:34:48 AM	Helium MFC set to  20.000000
1/7/2013	9:34:48 AM	H2 MFC set to  0.000000
1/7/2013	9:34:48 AM	BCl3 MFC set to  0.000000
1/7/2013	9:34:48 AM	PH3 MFC set to  0.000000
1/7/2013	9:34:48 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:34:48 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:34:48 AM	Tube furnace set to 0
1/7/2013	9:35:18 AM	Helium valve closed
1/7/2013	9:35:18 AM	H2 valve closed
1/7/2013	9:35:18 AM	BCl3 valve closed
1/7/2013	9:35:18 AM	PH3 valve closed
1/7/2013	9:35:18 AM	SiCl4 pre valve closed
1/7/2013	9:35:18 AM	SiCl4 post valve closed
1/7/2013	9:35:18 AM	Bypass valve closed
1/7/2013	9:35:18 AM	Bubbler valve closed
1/7/2013	9:35:18 AM	Main Vac valve opened
1/7/2013	9:35:18 AM	Helium MFC set to  0.000000
1/7/2013	9:35:18 AM	H2 MFC set to  0.000000
1/7/2013	9:35:18 AM	BCl3 MFC set to  0.000000
1/7/2013	9:35:18 AM	PH3 MFC set to  0.000000
1/7/2013	9:35:18 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:35:18 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:35:18 AM	Tube furnace set to 0
1/7/2013	9:35:48 AM	H2 valve closed
1/7/2013	9:35:48 AM	BCl3 valve closed
1/7/2013	9:35:48 AM	PH3 valve closed
1/7/2013	9:35:48 AM	SiCl4 pre valve closed
1/7/2013	9:35:48 AM	SiCl4 post valve closed
1/7/2013	9:35:48 AM	Bypass valve closed
1/7/2013	9:35:48 AM	Bubbler valve closed
1/7/2013	9:35:48 AM	Helium valve opened
1/7/2013	9:35:48 AM	Main Vac valve opened
1/7/2013	9:35:48 AM	Helium MFC set to  20.000000
1/7/2013	9:35:48 AM	H2 MFC set to  0.000000
1/7/2013	9:35:48 AM	BCl3 MFC set to  0.000000
1/7/2013	9:35:48 AM	PH3 MFC set to  0.000000
1/7/2013	9:35:49 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:35:49 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:35:49 AM	Tube furnace set to 0
1/7/2013	9:36:19 AM	Helium valve closed
1/7/2013	9:36:19 AM	H2 valve closed
1/7/2013	9:36:19 AM	BCl3 valve closed
1/7/2013	9:36:19 AM	PH3 valve closed
1/7/2013	9:36:19 AM	SiCl4 pre valve closed
1/7/2013	9:36:19 AM	SiCl4 post valve closed
1/7/2013	9:36:19 AM	Bypass valve closed
1/7/2013	9:36:19 AM	Bubbler valve closed
1/7/2013	9:36:19 AM	Main Vac valve opened
1/7/2013	9:36:19 AM	Helium MFC set to  0.000000
1/7/2013	9:36:19 AM	H2 MFC set to  0.000000
1/7/2013	9:36:19 AM	BCl3 MFC set to  0.000000
1/7/2013	9:36:19 AM	PH3 MFC set to  0.000000
1/7/2013	9:36:19 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:36:19 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:36:19 AM	Tube furnace set to 0
1/7/2013	9:36:49 AM	H2 valve closed
1/7/2013	9:36:49 AM	BCl3 valve closed
1/7/2013	9:36:49 AM	PH3 valve closed
1/7/2013	9:36:49 AM	SiCl4 pre valve closed
1/7/2013	9:36:49 AM	SiCl4 post valve closed
1/7/2013	9:36:49 AM	Bypass valve closed
1/7/2013	9:36:49 AM	Bubbler valve closed
1/7/2013	9:36:49 AM	Helium valve opened
1/7/2013	9:36:49 AM	Main Vac valve opened
1/7/2013	9:36:49 AM	Helium MFC set to  20.000000
1/7/2013	9:36:49 AM	H2 MFC set to  0.000000
1/7/2013	9:36:49 AM	BCl3 MFC set to  0.000000
1/7/2013	9:36:49 AM	PH3 MFC set to  0.000000
1/7/2013	9:36:49 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:36:49 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:36:49 AM	Tube furnace set to 0
1/7/2013	9:37:19 AM	Helium valve closed
1/7/2013	9:37:19 AM	H2 valve closed
1/7/2013	9:37:19 AM	BCl3 valve closed
1/7/2013	9:37:19 AM	PH3 valve closed
1/7/2013	9:37:19 AM	SiCl4 pre valve closed
1/7/2013	9:37:19 AM	SiCl4 post valve closed
1/7/2013	9:37:19 AM	Bypass valve closed
1/7/2013	9:37:19 AM	Bubbler valve closed
1/7/2013	9:37:19 AM	Main Vac valve opened
1/7/2013	9:37:19 AM	Helium MFC set to  0.000000
1/7/2013	9:37:19 AM	H2 MFC set to  0.000000
1/7/2013	9:37:19 AM	BCl3 MFC set to  0.000000
1/7/2013	9:37:19 AM	PH3 MFC set to  0.000000
1/7/2013	9:37:19 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:37:19 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:37:19 AM	Tube furnace set to 0
1/7/2013	9:37:20 AM	Run finished at 9:37 AM
1/7/2013	9:37:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/7/2013	9:41:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/7/2013	9:42:04 AM	Recipe started at 9:42 AM
1/7/2013	9:42:04 AM	Helium valve closed
1/7/2013	9:42:04 AM	H2 valve closed
1/7/2013	9:42:04 AM	BCl3 valve closed
1/7/2013	9:42:04 AM	PH3 valve closed
1/7/2013	9:42:04 AM	SiCl4 pre valve closed
1/7/2013	9:42:04 AM	SiCl4 post valve closed
1/7/2013	9:42:04 AM	Main Vac valve closed
1/7/2013	9:42:04 AM	Bubbler valve closed
1/7/2013	9:42:04 AM	Bypass valve opened
1/7/2013	9:42:04 AM	Helium MFC set to  0.000000
1/7/2013	9:42:04 AM	H2 MFC set to  0.000000
1/7/2013	9:42:04 AM	BCl3 MFC set to  0.000000
1/7/2013	9:42:04 AM	PH3 MFC set to  0.000000
1/7/2013	9:42:04 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:42:04 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:42:05 AM	Tube furnace set to 0
1/7/2013	9:42:05 AM	Helium valve closed
1/7/2013	9:42:05 AM	H2 valve closed
1/7/2013	9:42:05 AM	BCl3 valve closed
1/7/2013	9:42:05 AM	PH3 valve closed
1/7/2013	9:42:05 AM	SiCl4 pre valve closed
1/7/2013	9:42:05 AM	SiCl4 post valve closed
1/7/2013	9:42:05 AM	Main Vac valve closed
1/7/2013	9:42:05 AM	Bubbler valve closed
1/7/2013	9:42:05 AM	Bypass valve opened
1/7/2013	9:42:05 AM	Helium MFC set to  0.000000
1/7/2013	9:42:05 AM	H2 MFC set to  0.000000
1/7/2013	9:42:05 AM	BCl3 MFC set to  0.000000
1/7/2013	9:42:05 AM	PH3 MFC set to  0.000000
1/7/2013	9:42:05 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:42:05 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:42:05 AM	Tube furnace set to 0
1/7/2013	9:42:35 AM	Helium valve closed
1/7/2013	9:42:35 AM	H2 valve closed
1/7/2013	9:42:35 AM	BCl3 valve closed
1/7/2013	9:42:35 AM	PH3 valve closed
1/7/2013	9:42:35 AM	SiCl4 pre valve closed
1/7/2013	9:42:35 AM	SiCl4 post valve closed
1/7/2013	9:42:35 AM	Bypass valve closed
1/7/2013	9:42:35 AM	Bubbler valve closed
1/7/2013	9:42:35 AM	Main Vac valve opened
1/7/2013	9:42:35 AM	Helium MFC set to  0.000000
1/7/2013	9:42:35 AM	H2 MFC set to  0.000000
1/7/2013	9:42:35 AM	BCl3 MFC set to  0.000000
1/7/2013	9:42:35 AM	PH3 MFC set to  0.000000
1/7/2013	9:42:35 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:42:35 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:42:35 AM	Tube furnace set to 0
1/7/2013	9:43:05 AM	H2 valve closed
1/7/2013	9:43:05 AM	BCl3 valve closed
1/7/2013	9:43:05 AM	PH3 valve closed
1/7/2013	9:43:05 AM	SiCl4 pre valve closed
1/7/2013	9:43:05 AM	SiCl4 post valve closed
1/7/2013	9:43:05 AM	Bypass valve closed
1/7/2013	9:43:05 AM	Bubbler valve closed
1/7/2013	9:43:05 AM	Helium valve opened
1/7/2013	9:43:05 AM	Main Vac valve opened
1/7/2013	9:43:05 AM	Helium MFC set to  20.000000
1/7/2013	9:43:05 AM	H2 MFC set to  0.000000
1/7/2013	9:43:05 AM	BCl3 MFC set to  0.000000
1/7/2013	9:43:05 AM	PH3 MFC set to  0.000000
1/7/2013	9:43:05 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:43:05 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:43:06 AM	Tube furnace set to 0
1/7/2013	9:43:36 AM	Helium valve closed
1/7/2013	9:43:36 AM	H2 valve closed
1/7/2013	9:43:36 AM	BCl3 valve closed
1/7/2013	9:43:36 AM	PH3 valve closed
1/7/2013	9:43:36 AM	SiCl4 pre valve closed
1/7/2013	9:43:36 AM	SiCl4 post valve closed
1/7/2013	9:43:36 AM	Bypass valve closed
1/7/2013	9:43:36 AM	Bubbler valve closed
1/7/2013	9:43:36 AM	Main Vac valve opened
1/7/2013	9:43:36 AM	Helium MFC set to  0.000000
1/7/2013	9:43:36 AM	H2 MFC set to  0.000000
1/7/2013	9:43:36 AM	BCl3 MFC set to  0.000000
1/7/2013	9:43:36 AM	PH3 MFC set to  0.000000
1/7/2013	9:43:36 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:43:36 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:43:36 AM	Tube furnace set to 0
1/7/2013	9:44:06 AM	H2 valve closed
1/7/2013	9:44:06 AM	BCl3 valve closed
1/7/2013	9:44:06 AM	PH3 valve closed
1/7/2013	9:44:06 AM	SiCl4 pre valve closed
1/7/2013	9:44:06 AM	SiCl4 post valve closed
1/7/2013	9:44:06 AM	Bypass valve closed
1/7/2013	9:44:06 AM	Bubbler valve closed
1/7/2013	9:44:06 AM	Helium valve opened
1/7/2013	9:44:06 AM	Main Vac valve opened
1/7/2013	9:44:06 AM	Helium MFC set to  20.000000
1/7/2013	9:44:06 AM	H2 MFC set to  0.000000
1/7/2013	9:44:06 AM	BCl3 MFC set to  0.000000
1/7/2013	9:44:06 AM	PH3 MFC set to  0.000000
1/7/2013	9:44:06 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:44:06 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:44:06 AM	Tube furnace set to 0
1/7/2013	9:44:36 AM	Helium valve closed
1/7/2013	9:44:36 AM	H2 valve closed
1/7/2013	9:44:36 AM	BCl3 valve closed
1/7/2013	9:44:36 AM	PH3 valve closed
1/7/2013	9:44:36 AM	SiCl4 pre valve closed
1/7/2013	9:44:36 AM	SiCl4 post valve closed
1/7/2013	9:44:36 AM	Bypass valve closed
1/7/2013	9:44:36 AM	Bubbler valve closed
1/7/2013	9:44:36 AM	Main Vac valve opened
1/7/2013	9:44:36 AM	Helium MFC set to  0.000000
1/7/2013	9:44:36 AM	H2 MFC set to  0.000000
1/7/2013	9:44:36 AM	BCl3 MFC set to  0.000000
1/7/2013	9:44:36 AM	PH3 MFC set to  0.000000
1/7/2013	9:44:36 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:44:36 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:44:36 AM	Tube furnace set to 0
1/7/2013	9:45:06 AM	H2 valve closed
1/7/2013	9:45:06 AM	BCl3 valve closed
1/7/2013	9:45:06 AM	PH3 valve closed
1/7/2013	9:45:06 AM	SiCl4 pre valve closed
1/7/2013	9:45:06 AM	SiCl4 post valve closed
1/7/2013	9:45:06 AM	Bypass valve closed
1/7/2013	9:45:06 AM	Bubbler valve closed
1/7/2013	9:45:06 AM	Helium valve opened
1/7/2013	9:45:06 AM	Main Vac valve opened
1/7/2013	9:45:06 AM	Helium MFC set to  20.000000
1/7/2013	9:45:06 AM	H2 MFC set to  0.000000
1/7/2013	9:45:06 AM	BCl3 MFC set to  0.000000
1/7/2013	9:45:06 AM	PH3 MFC set to  0.000000
1/7/2013	9:45:06 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:45:06 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:45:07 AM	Tube furnace set to 0
1/7/2013	9:45:37 AM	Helium valve closed
1/7/2013	9:45:37 AM	H2 valve closed
1/7/2013	9:45:37 AM	BCl3 valve closed
1/7/2013	9:45:37 AM	PH3 valve closed
1/7/2013	9:45:37 AM	SiCl4 pre valve closed
1/7/2013	9:45:37 AM	SiCl4 post valve closed
1/7/2013	9:45:37 AM	Bypass valve closed
1/7/2013	9:45:37 AM	Bubbler valve closed
1/7/2013	9:45:37 AM	Main Vac valve opened
1/7/2013	9:45:37 AM	Helium MFC set to  0.000000
1/7/2013	9:45:37 AM	H2 MFC set to  0.000000
1/7/2013	9:45:37 AM	BCl3 MFC set to  0.000000
1/7/2013	9:45:37 AM	PH3 MFC set to  0.000000
1/7/2013	9:45:37 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:45:37 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:45:37 AM	Tube furnace set to 0
1/7/2013	9:46:07 AM	H2 valve closed
1/7/2013	9:46:07 AM	BCl3 valve closed
1/7/2013	9:46:07 AM	PH3 valve closed
1/7/2013	9:46:07 AM	SiCl4 pre valve closed
1/7/2013	9:46:07 AM	SiCl4 post valve closed
1/7/2013	9:46:07 AM	Bypass valve closed
1/7/2013	9:46:07 AM	Bubbler valve closed
1/7/2013	9:46:07 AM	Helium valve opened
1/7/2013	9:46:07 AM	Main Vac valve opened
1/7/2013	9:46:07 AM	Helium MFC set to  20.000000
1/7/2013	9:46:07 AM	H2 MFC set to  0.000000
1/7/2013	9:46:07 AM	BCl3 MFC set to  0.000000
1/7/2013	9:46:07 AM	PH3 MFC set to  0.000000
1/7/2013	9:46:07 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:46:07 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:46:07 AM	Tube furnace set to 0
1/7/2013	9:46:37 AM	Helium valve closed
1/7/2013	9:46:37 AM	H2 valve closed
1/7/2013	9:46:37 AM	BCl3 valve closed
1/7/2013	9:46:37 AM	PH3 valve closed
1/7/2013	9:46:37 AM	SiCl4 pre valve closed
1/7/2013	9:46:37 AM	SiCl4 post valve closed
1/7/2013	9:46:37 AM	Bypass valve closed
1/7/2013	9:46:37 AM	Bubbler valve closed
1/7/2013	9:46:37 AM	Main Vac valve opened
1/7/2013	9:46:37 AM	Helium MFC set to  0.000000
1/7/2013	9:46:37 AM	H2 MFC set to  0.000000
1/7/2013	9:46:37 AM	BCl3 MFC set to  0.000000
1/7/2013	9:46:37 AM	PH3 MFC set to  0.000000
1/7/2013	9:46:37 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:46:37 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:46:37 AM	Tube furnace set to 0
1/7/2013	9:47:07 AM	H2 valve closed
1/7/2013	9:47:07 AM	BCl3 valve closed
1/7/2013	9:47:07 AM	PH3 valve closed
1/7/2013	9:47:07 AM	SiCl4 pre valve closed
1/7/2013	9:47:07 AM	SiCl4 post valve closed
1/7/2013	9:47:07 AM	Bypass valve closed
1/7/2013	9:47:07 AM	Bubbler valve closed
1/7/2013	9:47:07 AM	Helium valve opened
1/7/2013	9:47:07 AM	Main Vac valve opened
1/7/2013	9:47:07 AM	Helium MFC set to  20.000000
1/7/2013	9:47:07 AM	H2 MFC set to  0.000000
1/7/2013	9:47:07 AM	BCl3 MFC set to  0.000000
1/7/2013	9:47:07 AM	PH3 MFC set to  0.000000
1/7/2013	9:47:07 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:47:07 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:47:08 AM	Tube furnace set to 0
1/7/2013	9:47:38 AM	Helium valve closed
1/7/2013	9:47:38 AM	H2 valve closed
1/7/2013	9:47:38 AM	BCl3 valve closed
1/7/2013	9:47:38 AM	PH3 valve closed
1/7/2013	9:47:38 AM	SiCl4 pre valve closed
1/7/2013	9:47:38 AM	SiCl4 post valve closed
1/7/2013	9:47:38 AM	Bypass valve closed
1/7/2013	9:47:38 AM	Bubbler valve closed
1/7/2013	9:47:38 AM	Main Vac valve opened
1/7/2013	9:47:38 AM	Helium MFC set to  0.000000
1/7/2013	9:47:38 AM	H2 MFC set to  0.000000
1/7/2013	9:47:38 AM	BCl3 MFC set to  0.000000
1/7/2013	9:47:38 AM	PH3 MFC set to  0.000000
1/7/2013	9:47:38 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:47:38 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:47:38 AM	Tube furnace set to 0
1/7/2013	9:48:08 AM	H2 valve closed
1/7/2013	9:48:08 AM	BCl3 valve closed
1/7/2013	9:48:08 AM	PH3 valve closed
1/7/2013	9:48:08 AM	SiCl4 pre valve closed
1/7/2013	9:48:08 AM	SiCl4 post valve closed
1/7/2013	9:48:08 AM	Bypass valve closed
1/7/2013	9:48:08 AM	Bubbler valve closed
1/7/2013	9:48:08 AM	Helium valve opened
1/7/2013	9:48:08 AM	Main Vac valve opened
1/7/2013	9:48:08 AM	Helium MFC set to  20.000000
1/7/2013	9:48:08 AM	H2 MFC set to  0.000000
1/7/2013	9:48:08 AM	BCl3 MFC set to  0.000000
1/7/2013	9:48:08 AM	PH3 MFC set to  0.000000
1/7/2013	9:48:08 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:48:08 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:48:08 AM	Tube furnace set to 0
1/7/2013	9:48:38 AM	Helium valve closed
1/7/2013	9:48:38 AM	H2 valve closed
1/7/2013	9:48:38 AM	BCl3 valve closed
1/7/2013	9:48:38 AM	PH3 valve closed
1/7/2013	9:48:38 AM	SiCl4 pre valve closed
1/7/2013	9:48:38 AM	SiCl4 post valve closed
1/7/2013	9:48:38 AM	Bypass valve closed
1/7/2013	9:48:38 AM	Bubbler valve closed
1/7/2013	9:48:38 AM	Main Vac valve opened
1/7/2013	9:48:38 AM	Helium MFC set to  0.000000
1/7/2013	9:48:38 AM	H2 MFC set to  0.000000
1/7/2013	9:48:38 AM	BCl3 MFC set to  0.000000
1/7/2013	9:48:38 AM	PH3 MFC set to  0.000000
1/7/2013	9:48:38 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:48:38 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:48:38 AM	Tube furnace set to 0
1/7/2013	9:49:08 AM	H2 valve closed
1/7/2013	9:49:08 AM	BCl3 valve closed
1/7/2013	9:49:08 AM	PH3 valve closed
1/7/2013	9:49:08 AM	SiCl4 pre valve closed
1/7/2013	9:49:08 AM	SiCl4 post valve closed
1/7/2013	9:49:08 AM	Bypass valve closed
1/7/2013	9:49:08 AM	Bubbler valve closed
1/7/2013	9:49:08 AM	Helium valve opened
1/7/2013	9:49:08 AM	Main Vac valve opened
1/7/2013	9:49:08 AM	Helium MFC set to  20.000000
1/7/2013	9:49:08 AM	H2 MFC set to  0.000000
1/7/2013	9:49:08 AM	BCl3 MFC set to  0.000000
1/7/2013	9:49:08 AM	PH3 MFC set to  0.000000
1/7/2013	9:49:08 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:49:08 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:49:09 AM	Tube furnace set to 0
1/7/2013	9:49:39 AM	Helium valve closed
1/7/2013	9:49:39 AM	H2 valve closed
1/7/2013	9:49:39 AM	BCl3 valve closed
1/7/2013	9:49:39 AM	PH3 valve closed
1/7/2013	9:49:39 AM	SiCl4 pre valve closed
1/7/2013	9:49:39 AM	SiCl4 post valve closed
1/7/2013	9:49:39 AM	Bypass valve closed
1/7/2013	9:49:39 AM	Bubbler valve closed
1/7/2013	9:49:39 AM	Main Vac valve opened
1/7/2013	9:49:39 AM	Helium MFC set to  0.000000
1/7/2013	9:49:39 AM	H2 MFC set to  0.000000
1/7/2013	9:49:39 AM	BCl3 MFC set to  0.000000
1/7/2013	9:49:39 AM	PH3 MFC set to  0.000000
1/7/2013	9:49:39 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:49:39 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:49:39 AM	Tube furnace set to 0
1/7/2013	9:50:09 AM	H2 valve closed
1/7/2013	9:50:09 AM	BCl3 valve closed
1/7/2013	9:50:09 AM	PH3 valve closed
1/7/2013	9:50:09 AM	SiCl4 pre valve closed
1/7/2013	9:50:09 AM	SiCl4 post valve closed
1/7/2013	9:50:09 AM	Bypass valve closed
1/7/2013	9:50:09 AM	Bubbler valve closed
1/7/2013	9:50:09 AM	Helium valve opened
1/7/2013	9:50:09 AM	Main Vac valve opened
1/7/2013	9:50:09 AM	Helium MFC set to  20.000000
1/7/2013	9:50:09 AM	H2 MFC set to  0.000000
1/7/2013	9:50:09 AM	BCl3 MFC set to  0.000000
1/7/2013	9:50:09 AM	PH3 MFC set to  0.000000
1/7/2013	9:50:09 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:50:09 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:50:09 AM	Tube furnace set to 0
1/7/2013	9:50:39 AM	Helium valve closed
1/7/2013	9:50:39 AM	H2 valve closed
1/7/2013	9:50:39 AM	BCl3 valve closed
1/7/2013	9:50:39 AM	PH3 valve closed
1/7/2013	9:50:39 AM	SiCl4 pre valve closed
1/7/2013	9:50:39 AM	SiCl4 post valve closed
1/7/2013	9:50:39 AM	Bypass valve closed
1/7/2013	9:50:39 AM	Bubbler valve closed
1/7/2013	9:50:39 AM	Main Vac valve opened
1/7/2013	9:50:39 AM	Helium MFC set to  0.000000
1/7/2013	9:50:39 AM	H2 MFC set to  0.000000
1/7/2013	9:50:39 AM	BCl3 MFC set to  0.000000
1/7/2013	9:50:39 AM	PH3 MFC set to  0.000000
1/7/2013	9:50:39 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:50:39 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:50:39 AM	Tube furnace set to 0
1/7/2013	9:51:09 AM	H2 valve closed
1/7/2013	9:51:09 AM	BCl3 valve closed
1/7/2013	9:51:09 AM	PH3 valve closed
1/7/2013	9:51:09 AM	SiCl4 pre valve closed
1/7/2013	9:51:09 AM	SiCl4 post valve closed
1/7/2013	9:51:09 AM	Bypass valve closed
1/7/2013	9:51:09 AM	Bubbler valve closed
1/7/2013	9:51:09 AM	Helium valve opened
1/7/2013	9:51:09 AM	Main Vac valve opened
1/7/2013	9:51:09 AM	Helium MFC set to  20.000000
1/7/2013	9:51:09 AM	H2 MFC set to  0.000000
1/7/2013	9:51:09 AM	BCl3 MFC set to  0.000000
1/7/2013	9:51:09 AM	PH3 MFC set to  0.000000
1/7/2013	9:51:09 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:51:09 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:51:10 AM	Tube furnace set to 0
1/7/2013	9:51:40 AM	Helium valve closed
1/7/2013	9:51:40 AM	H2 valve closed
1/7/2013	9:51:40 AM	BCl3 valve closed
1/7/2013	9:51:40 AM	PH3 valve closed
1/7/2013	9:51:40 AM	SiCl4 pre valve closed
1/7/2013	9:51:40 AM	SiCl4 post valve closed
1/7/2013	9:51:40 AM	Bypass valve closed
1/7/2013	9:51:40 AM	Bubbler valve closed
1/7/2013	9:51:40 AM	Main Vac valve opened
1/7/2013	9:51:40 AM	Helium MFC set to  0.000000
1/7/2013	9:51:40 AM	H2 MFC set to  0.000000
1/7/2013	9:51:40 AM	BCl3 MFC set to  0.000000
1/7/2013	9:51:40 AM	PH3 MFC set to  0.000000
1/7/2013	9:51:40 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:51:40 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:51:40 AM	Tube furnace set to 0
1/7/2013	9:52:10 AM	H2 valve closed
1/7/2013	9:52:10 AM	BCl3 valve closed
1/7/2013	9:52:10 AM	PH3 valve closed
1/7/2013	9:52:10 AM	SiCl4 pre valve closed
1/7/2013	9:52:10 AM	SiCl4 post valve closed
1/7/2013	9:52:10 AM	Bypass valve closed
1/7/2013	9:52:10 AM	Bubbler valve closed
1/7/2013	9:52:10 AM	Helium valve opened
1/7/2013	9:52:10 AM	Main Vac valve opened
1/7/2013	9:52:10 AM	Helium MFC set to  20.000000
1/7/2013	9:52:10 AM	H2 MFC set to  0.000000
1/7/2013	9:52:10 AM	BCl3 MFC set to  0.000000
1/7/2013	9:52:10 AM	PH3 MFC set to  0.000000
1/7/2013	9:52:10 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:52:10 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:52:10 AM	Tube furnace set to 0
1/7/2013	9:52:40 AM	Helium valve closed
1/7/2013	9:52:40 AM	H2 valve closed
1/7/2013	9:52:40 AM	BCl3 valve closed
1/7/2013	9:52:40 AM	PH3 valve closed
1/7/2013	9:52:40 AM	SiCl4 pre valve closed
1/7/2013	9:52:40 AM	SiCl4 post valve closed
1/7/2013	9:52:40 AM	Bypass valve closed
1/7/2013	9:52:40 AM	Bubbler valve closed
1/7/2013	9:52:40 AM	Main Vac valve opened
1/7/2013	9:52:40 AM	Helium MFC set to  0.000000
1/7/2013	9:52:40 AM	H2 MFC set to  0.000000
1/7/2013	9:52:40 AM	BCl3 MFC set to  0.000000
1/7/2013	9:52:40 AM	PH3 MFC set to  0.000000
1/7/2013	9:52:40 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:52:40 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:52:40 AM	Tube furnace set to 0
1/7/2013	9:52:41 AM	Run finished at 9:52 AM
1/7/2013	9:52:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/7/2013	9:54:50 AM	Main Vac valve closed
1/7/2013	9:56:17 AM	Main Vac valve opened
1/7/2013	9:57:00 AM	Recipe started at 9:56 AM
1/7/2013	9:57:00 AM	Helium valve closed
1/7/2013	9:57:00 AM	H2 valve closed
1/7/2013	9:57:00 AM	BCl3 valve closed
1/7/2013	9:57:00 AM	PH3 valve closed
1/7/2013	9:57:00 AM	SiCl4 pre valve closed
1/7/2013	9:57:00 AM	SiCl4 post valve closed
1/7/2013	9:57:00 AM	Main Vac valve closed
1/7/2013	9:57:00 AM	Bypass valve closed
1/7/2013	9:57:00 AM	Bubbler valve closed
1/7/2013	9:57:00 AM	Helium MFC set to  0.000000
1/7/2013	9:57:00 AM	H2 MFC set to  0.000000
1/7/2013	9:57:00 AM	BCl3 MFC set to  0.000000
1/7/2013	9:57:00 AM	PH3 MFC set to  0.000000
1/7/2013	9:57:00 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:57:00 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:57:00 AM	Tube furnace set to 0
1/7/2013	9:57:03 AM	Helium valve closed
1/7/2013	9:57:03 AM	BCl3 valve closed
1/7/2013	9:57:03 AM	PH3 valve closed
1/7/2013	9:57:03 AM	SiCl4 pre valve closed
1/7/2013	9:57:03 AM	SiCl4 post valve closed
1/7/2013	9:57:03 AM	Main Vac valve closed
1/7/2013	9:57:03 AM	Bypass valve closed
1/7/2013	9:57:03 AM	Bubbler valve closed
1/7/2013	9:57:03 AM	H2 valve opened
1/7/2013	9:57:03 AM	Helium MFC set to  0.000000
1/7/2013	9:57:03 AM	H2 MFC set to  500.000000
1/7/2013	9:57:03 AM	BCl3 MFC set to  0.000000
1/7/2013	9:57:03 AM	PH3 MFC set to  0.000000
1/7/2013	9:57:03 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:57:03 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:57:03 AM	Tube furnace set to 0
1/7/2013	9:58:18 AM	Helium valve closed
1/7/2013	9:58:18 AM	BCl3 valve closed
1/7/2013	9:58:18 AM	PH3 valve closed
1/7/2013	9:58:18 AM	SiCl4 pre valve closed
1/7/2013	9:58:18 AM	SiCl4 post valve closed
1/7/2013	9:58:18 AM	Main Vac valve closed
1/7/2013	9:58:18 AM	Bypass valve closed
1/7/2013	9:58:18 AM	H2 valve opened
1/7/2013	9:58:18 AM	Bubbler valve opened
1/7/2013	9:58:18 AM	Helium MFC set to  0.000000
1/7/2013	9:58:18 AM	H2 MFC set to  500.000000
1/7/2013	9:58:18 AM	BCl3 MFC set to  0.000000
1/7/2013	9:58:18 AM	PH3 MFC set to  0.000000
1/7/2013	9:58:18 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:58:18 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:58:18 AM	Tube furnace set to 0
1/7/2013	9:58:19 AM	Helium valve closed
1/7/2013	9:58:19 AM	BCl3 valve closed
1/7/2013	9:58:20 AM	PH3 valve closed
1/7/2013	9:58:20 AM	SiCl4 pre valve closed
1/7/2013	9:58:20 AM	SiCl4 post valve closed
1/7/2013	9:58:20 AM	Main Vac valve closed
1/7/2013	9:58:20 AM	Bypass valve closed
1/7/2013	9:58:20 AM	H2 valve opened
1/7/2013	9:58:20 AM	Bubbler valve opened
1/7/2013	9:58:20 AM	Helium MFC set to  0.000000
1/7/2013	9:58:20 AM	H2 MFC set to  500.000000
1/7/2013	9:58:20 AM	BCl3 MFC set to  0.000000
1/7/2013	9:58:20 AM	PH3 MFC set to  0.000000
1/7/2013	9:58:20 AM	SiCl4 MFC set to  0.000000
1/7/2013	9:58:20 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	9:58:20 AM	Tube furnace set to 1000
1/7/2013	10:18:20 AM	Helium valve closed
1/7/2013	10:18:20 AM	PH3 valve closed
1/7/2013	10:18:20 AM	Main Vac valve closed
1/7/2013	10:18:20 AM	Bypass valve closed
1/7/2013	10:18:20 AM	H2 valve opened
1/7/2013	10:18:20 AM	BCl3 valve opened
1/7/2013	10:18:20 AM	SiCl4 pre valve opened
1/7/2013	10:18:20 AM	SiCl4 post valve opened
1/7/2013	10:18:20 AM	Bubbler valve opened
1/7/2013	10:18:20 AM	Helium MFC set to  0.000000
1/7/2013	10:18:20 AM	H2 MFC set to  500.000000
1/7/2013	10:18:20 AM	BCl3 MFC set to  0.000000
1/7/2013	10:18:20 AM	PH3 MFC set to  20.000000
1/7/2013	10:18:20 AM	SiCl4 MFC set to  50.000000
1/7/2013	10:18:20 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	10:18:20 AM	Tube furnace set to 1000
1/7/2013	10:38:20 AM	Helium valve closed
1/7/2013	10:38:20 AM	BCl3 valve closed
1/7/2013	10:38:20 AM	PH3 valve closed
1/7/2013	10:38:20 AM	SiCl4 pre valve closed
1/7/2013	10:38:20 AM	SiCl4 post valve closed
1/7/2013	10:38:20 AM	Main Vac valve closed
1/7/2013	10:38:20 AM	Bypass valve closed
1/7/2013	10:38:20 AM	H2 valve opened
1/7/2013	10:38:20 AM	Bubbler valve opened
1/7/2013	10:38:20 AM	Helium MFC set to  0.000000
1/7/2013	10:38:20 AM	H2 MFC set to  500.000000
1/7/2013	10:38:20 AM	BCl3 MFC set to  0.000000
1/7/2013	10:38:20 AM	PH3 MFC set to  0.000000
1/7/2013	10:38:20 AM	SiCl4 MFC set to  0.000000
1/7/2013	10:38:20 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	10:38:20 AM	Tube furnace set to 750
1/7/2013	10:43:20 AM	H2 valve closed
1/7/2013	10:43:20 AM	BCl3 valve closed
1/7/2013	10:43:20 AM	PH3 valve closed
1/7/2013	10:43:20 AM	SiCl4 pre valve closed
1/7/2013	10:43:20 AM	SiCl4 post valve closed
1/7/2013	10:43:20 AM	Main Vac valve closed
1/7/2013	10:43:20 AM	Bypass valve closed
1/7/2013	10:43:20 AM	Helium valve opened
1/7/2013	10:43:20 AM	Bubbler valve opened
1/7/2013	10:43:20 AM	Helium MFC set to  500.000000
1/7/2013	10:43:20 AM	H2 MFC set to  0.000000
1/7/2013	10:43:20 AM	BCl3 MFC set to  0.000000
1/7/2013	10:43:20 AM	PH3 MFC set to  0.000000
1/7/2013	10:43:20 AM	SiCl4 MFC set to  0.000000
1/7/2013	10:43:20 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	10:43:20 AM	Tube furnace set to 0
1/7/2013	11:03:20 AM	Helium valve closed
1/7/2013	11:03:20 AM	H2 valve closed
1/7/2013	11:03:20 AM	BCl3 valve closed
1/7/2013	11:03:20 AM	PH3 valve closed
1/7/2013	11:03:20 AM	SiCl4 pre valve closed
1/7/2013	11:03:20 AM	SiCl4 post valve closed
1/7/2013	11:03:20 AM	Main Vac valve closed
1/7/2013	11:03:20 AM	Bypass valve closed
1/7/2013	11:03:20 AM	Bubbler valve closed
1/7/2013	11:03:20 AM	Helium MFC set to  0.000000
1/7/2013	11:03:20 AM	H2 MFC set to  0.000000
1/7/2013	11:03:20 AM	BCl3 MFC set to  0.000000
1/7/2013	11:03:20 AM	PH3 MFC set to  0.000000
1/7/2013	11:03:20 AM	SiCl4 MFC set to  0.000000
1/7/2013	11:03:20 AM	Bypass solenoid MFC set to  0.000000
1/7/2013	11:03:21 AM	Tube furnace set to 0
1/7/2013	11:03:22 AM	Run finished at 11:03 AM
1/7/2013	2:07:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2013	2:07:09 PM	Recipe started at 2:07 PM
1/7/2013	2:07:09 PM	Helium valve closed
1/7/2013	2:07:09 PM	H2 valve closed
1/7/2013	2:07:09 PM	BCl3 valve closed
1/7/2013	2:07:09 PM	PH3 valve closed
1/7/2013	2:07:09 PM	SiCl4 pre valve closed
1/7/2013	2:07:09 PM	SiCl4 post valve closed
1/7/2013	2:07:09 PM	Main Vac valve closed
1/7/2013	2:07:09 PM	Bypass valve closed
1/7/2013	2:07:09 PM	Bubbler valve closed
1/7/2013	2:07:09 PM	Helium MFC set to  0.000000
1/7/2013	2:07:09 PM	H2 MFC set to  0.000000
1/7/2013	2:07:09 PM	BCl3 MFC set to  0.000000
1/7/2013	2:07:09 PM	PH3 MFC set to  0.000000
1/7/2013	2:07:09 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:07:09 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:07:09 PM	Tube furnace set to 0
1/7/2013	2:07:13 PM	H2 valve closed
1/7/2013	2:07:13 PM	BCl3 valve closed
1/7/2013	2:07:13 PM	PH3 valve closed
1/7/2013	2:07:13 PM	SiCl4 pre valve closed
1/7/2013	2:07:13 PM	SiCl4 post valve closed
1/7/2013	2:07:13 PM	Main Vac valve closed
1/7/2013	2:07:13 PM	Bypass valve closed
1/7/2013	2:07:13 PM	Bubbler valve closed
1/7/2013	2:07:13 PM	Helium valve opened
1/7/2013	2:07:13 PM	Helium MFC set to  500.000000
1/7/2013	2:07:13 PM	H2 MFC set to  0.000000
1/7/2013	2:07:13 PM	BCl3 MFC set to  0.000000
1/7/2013	2:07:13 PM	PH3 MFC set to  0.000000
1/7/2013	2:07:13 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:07:13 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:07:13 PM	Tube furnace set to 0
1/7/2013	2:07:21 PM	Helium valve closed
1/7/2013	2:07:21 PM	H2 valve closed
1/7/2013	2:07:21 PM	BCl3 valve closed
1/7/2013	2:07:21 PM	PH3 valve closed
1/7/2013	2:07:21 PM	SiCl4 pre valve closed
1/7/2013	2:07:21 PM	SiCl4 post valve closed
1/7/2013	2:07:21 PM	Main Vac valve closed
1/7/2013	2:07:21 PM	Bypass valve closed
1/7/2013	2:07:21 PM	Bubbler valve closed
1/7/2013	2:07:21 PM	Helium MFC set to  0.000000
1/7/2013	2:07:21 PM	H2 MFC set to  0.000000
1/7/2013	2:07:21 PM	BCl3 MFC set to  0.000000
1/7/2013	2:07:21 PM	PH3 MFC set to  0.000000
1/7/2013	2:07:21 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:07:21 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:07:21 PM	Tube furnace set to 0
1/7/2013	2:07:22 PM	Run finished at 2:07 PM
1/7/2013	2:07:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2013	2:10:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2013	2:10:02 PM	Recipe started at 2:10 PM
1/7/2013	2:10:02 PM	Helium valve closed
1/7/2013	2:10:02 PM	H2 valve closed
1/7/2013	2:10:02 PM	BCl3 valve closed
1/7/2013	2:10:02 PM	PH3 valve closed
1/7/2013	2:10:02 PM	SiCl4 pre valve closed
1/7/2013	2:10:02 PM	SiCl4 post valve closed
1/7/2013	2:10:02 PM	Main Vac valve closed
1/7/2013	2:10:02 PM	Bubbler valve closed
1/7/2013	2:10:02 PM	Bypass valve opened
1/7/2013	2:10:02 PM	Helium MFC set to  0.000000
1/7/2013	2:10:02 PM	H2 MFC set to  0.000000
1/7/2013	2:10:02 PM	BCl3 MFC set to  0.000000
1/7/2013	2:10:02 PM	PH3 MFC set to  0.000000
1/7/2013	2:10:02 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:10:02 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:10:02 PM	Tube furnace set to 0
1/7/2013	2:11:19 PM	Helium valve closed
1/7/2013	2:11:19 PM	H2 valve closed
1/7/2013	2:11:19 PM	BCl3 valve closed
1/7/2013	2:11:19 PM	PH3 valve closed
1/7/2013	2:11:19 PM	SiCl4 pre valve closed
1/7/2013	2:11:19 PM	SiCl4 post valve closed
1/7/2013	2:11:19 PM	Main Vac valve closed
1/7/2013	2:11:19 PM	Bubbler valve closed
1/7/2013	2:11:19 PM	Bypass valve opened
1/7/2013	2:11:19 PM	Helium MFC set to  0.000000
1/7/2013	2:11:19 PM	H2 MFC set to  0.000000
1/7/2013	2:11:19 PM	BCl3 MFC set to  0.000000
1/7/2013	2:11:19 PM	PH3 MFC set to  0.000000
1/7/2013	2:11:19 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:11:19 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:11:20 PM	Tube furnace set to 0
1/7/2013	2:12:20 PM	Helium valve closed
1/7/2013	2:12:20 PM	H2 valve closed
1/7/2013	2:12:20 PM	BCl3 valve closed
1/7/2013	2:12:20 PM	PH3 valve closed
1/7/2013	2:12:20 PM	SiCl4 pre valve closed
1/7/2013	2:12:20 PM	SiCl4 post valve closed
1/7/2013	2:12:20 PM	Bypass valve closed
1/7/2013	2:12:20 PM	Bubbler valve closed
1/7/2013	2:12:20 PM	Main Vac valve opened
1/7/2013	2:12:20 PM	Helium MFC set to  0.000000
1/7/2013	2:12:20 PM	H2 MFC set to  0.000000
1/7/2013	2:12:20 PM	BCl3 MFC set to  0.000000
1/7/2013	2:12:20 PM	PH3 MFC set to  0.000000
1/7/2013	2:12:20 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:12:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:12:20 PM	Tube furnace set to 0
1/7/2013	2:12:21 PM	Run finished at 2:12 PM
1/7/2013	2:12:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2013	2:12:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/7/2013	2:12:48 PM	Recipe started at 2:12 PM
1/7/2013	2:12:48 PM	Helium valve closed
1/7/2013	2:12:48 PM	H2 valve closed
1/7/2013	2:12:48 PM	BCl3 valve closed
1/7/2013	2:12:48 PM	PH3 valve closed
1/7/2013	2:12:48 PM	SiCl4 pre valve closed
1/7/2013	2:12:48 PM	SiCl4 post valve closed
1/7/2013	2:12:48 PM	Main Vac valve closed
1/7/2013	2:12:48 PM	Bubbler valve closed
1/7/2013	2:12:48 PM	Bypass valve opened
1/7/2013	2:12:48 PM	Helium MFC set to  0.000000
1/7/2013	2:12:48 PM	H2 MFC set to  0.000000
1/7/2013	2:12:48 PM	BCl3 MFC set to  0.000000
1/7/2013	2:12:48 PM	PH3 MFC set to  0.000000
1/7/2013	2:12:48 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:12:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:12:48 PM	Tube furnace set to 0
1/7/2013	2:12:49 PM	Helium valve closed
1/7/2013	2:12:49 PM	H2 valve closed
1/7/2013	2:12:49 PM	BCl3 valve closed
1/7/2013	2:12:49 PM	PH3 valve closed
1/7/2013	2:12:49 PM	SiCl4 pre valve closed
1/7/2013	2:12:49 PM	SiCl4 post valve closed
1/7/2013	2:12:49 PM	Main Vac valve closed
1/7/2013	2:12:49 PM	Bubbler valve closed
1/7/2013	2:12:49 PM	Bypass valve opened
1/7/2013	2:12:49 PM	Helium MFC set to  0.000000
1/7/2013	2:12:49 PM	H2 MFC set to  0.000000
1/7/2013	2:12:49 PM	BCl3 MFC set to  0.000000
1/7/2013	2:12:49 PM	PH3 MFC set to  0.000000
1/7/2013	2:12:49 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:12:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:12:49 PM	Tube furnace set to 0
1/7/2013	2:13:19 PM	Helium valve closed
1/7/2013	2:13:19 PM	H2 valve closed
1/7/2013	2:13:19 PM	BCl3 valve closed
1/7/2013	2:13:19 PM	PH3 valve closed
1/7/2013	2:13:19 PM	SiCl4 pre valve closed
1/7/2013	2:13:19 PM	SiCl4 post valve closed
1/7/2013	2:13:19 PM	Bypass valve closed
1/7/2013	2:13:19 PM	Bubbler valve closed
1/7/2013	2:13:19 PM	Main Vac valve opened
1/7/2013	2:13:19 PM	Helium MFC set to  0.000000
1/7/2013	2:13:19 PM	H2 MFC set to  0.000000
1/7/2013	2:13:19 PM	BCl3 MFC set to  0.000000
1/7/2013	2:13:19 PM	PH3 MFC set to  0.000000
1/7/2013	2:13:19 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:13:19 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:13:19 PM	Tube furnace set to 0
1/7/2013	2:13:49 PM	H2 valve closed
1/7/2013	2:13:49 PM	BCl3 valve closed
1/7/2013	2:13:49 PM	PH3 valve closed
1/7/2013	2:13:49 PM	SiCl4 pre valve closed
1/7/2013	2:13:49 PM	SiCl4 post valve closed
1/7/2013	2:13:49 PM	Bypass valve closed
1/7/2013	2:13:49 PM	Bubbler valve closed
1/7/2013	2:13:49 PM	Helium valve opened
1/7/2013	2:13:49 PM	Main Vac valve opened
1/7/2013	2:13:49 PM	Helium MFC set to  20.000000
1/7/2013	2:13:49 PM	H2 MFC set to  0.000000
1/7/2013	2:13:49 PM	BCl3 MFC set to  0.000000
1/7/2013	2:13:49 PM	PH3 MFC set to  0.000000
1/7/2013	2:13:49 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:13:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:13:49 PM	Tube furnace set to 0
1/7/2013	2:14:19 PM	Helium valve closed
1/7/2013	2:14:19 PM	H2 valve closed
1/7/2013	2:14:19 PM	BCl3 valve closed
1/7/2013	2:14:19 PM	PH3 valve closed
1/7/2013	2:14:19 PM	SiCl4 pre valve closed
1/7/2013	2:14:19 PM	SiCl4 post valve closed
1/7/2013	2:14:20 PM	Bypass valve closed
1/7/2013	2:14:20 PM	Bubbler valve closed
1/7/2013	2:14:20 PM	Main Vac valve opened
1/7/2013	2:14:20 PM	Helium MFC set to  0.000000
1/7/2013	2:14:20 PM	H2 MFC set to  0.000000
1/7/2013	2:14:20 PM	BCl3 MFC set to  0.000000
1/7/2013	2:14:20 PM	PH3 MFC set to  0.000000
1/7/2013	2:14:20 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:14:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:14:20 PM	Tube furnace set to 0
1/7/2013	2:14:50 PM	H2 valve closed
1/7/2013	2:14:50 PM	BCl3 valve closed
1/7/2013	2:14:50 PM	PH3 valve closed
1/7/2013	2:14:50 PM	SiCl4 pre valve closed
1/7/2013	2:14:50 PM	SiCl4 post valve closed
1/7/2013	2:14:50 PM	Bypass valve closed
1/7/2013	2:14:50 PM	Bubbler valve closed
1/7/2013	2:14:50 PM	Helium valve opened
1/7/2013	2:14:50 PM	Main Vac valve opened
1/7/2013	2:14:50 PM	Helium MFC set to  20.000000
1/7/2013	2:14:50 PM	H2 MFC set to  0.000000
1/7/2013	2:14:50 PM	BCl3 MFC set to  0.000000
1/7/2013	2:14:50 PM	PH3 MFC set to  0.000000
1/7/2013	2:14:50 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:14:50 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:14:50 PM	Tube furnace set to 0
1/7/2013	2:15:20 PM	Helium valve closed
1/7/2013	2:15:20 PM	H2 valve closed
1/7/2013	2:15:20 PM	BCl3 valve closed
1/7/2013	2:15:20 PM	PH3 valve closed
1/7/2013	2:15:20 PM	SiCl4 pre valve closed
1/7/2013	2:15:20 PM	SiCl4 post valve closed
1/7/2013	2:15:20 PM	Bypass valve closed
1/7/2013	2:15:20 PM	Bubbler valve closed
1/7/2013	2:15:20 PM	Main Vac valve opened
1/7/2013	2:15:20 PM	Helium MFC set to  0.000000
1/7/2013	2:15:20 PM	H2 MFC set to  0.000000
1/7/2013	2:15:20 PM	BCl3 MFC set to  0.000000
1/7/2013	2:15:20 PM	PH3 MFC set to  0.000000
1/7/2013	2:15:20 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:15:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:15:20 PM	Tube furnace set to 0
1/7/2013	2:15:50 PM	H2 valve closed
1/7/2013	2:15:50 PM	BCl3 valve closed
1/7/2013	2:15:50 PM	PH3 valve closed
1/7/2013	2:15:50 PM	SiCl4 pre valve closed
1/7/2013	2:15:50 PM	SiCl4 post valve closed
1/7/2013	2:15:50 PM	Bypass valve closed
1/7/2013	2:15:50 PM	Bubbler valve closed
1/7/2013	2:15:50 PM	Helium valve opened
1/7/2013	2:15:50 PM	Main Vac valve opened
1/7/2013	2:15:50 PM	Helium MFC set to  20.000000
1/7/2013	2:15:50 PM	H2 MFC set to  0.000000
1/7/2013	2:15:50 PM	BCl3 MFC set to  0.000000
1/7/2013	2:15:50 PM	PH3 MFC set to  0.000000
1/7/2013	2:15:50 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:15:50 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:15:50 PM	Tube furnace set to 0
1/7/2013	2:16:20 PM	Helium valve closed
1/7/2013	2:16:20 PM	H2 valve closed
1/7/2013	2:16:20 PM	BCl3 valve closed
1/7/2013	2:16:20 PM	PH3 valve closed
1/7/2013	2:16:20 PM	SiCl4 pre valve closed
1/7/2013	2:16:20 PM	SiCl4 post valve closed
1/7/2013	2:16:20 PM	Bypass valve closed
1/7/2013	2:16:20 PM	Bubbler valve closed
1/7/2013	2:16:20 PM	Main Vac valve opened
1/7/2013	2:16:20 PM	Helium MFC set to  0.000000
1/7/2013	2:16:20 PM	H2 MFC set to  0.000000
1/7/2013	2:16:21 PM	BCl3 MFC set to  0.000000
1/7/2013	2:16:21 PM	PH3 MFC set to  0.000000
1/7/2013	2:16:21 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:16:21 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:16:21 PM	Tube furnace set to 0
1/7/2013	2:16:51 PM	H2 valve closed
1/7/2013	2:16:51 PM	BCl3 valve closed
1/7/2013	2:16:51 PM	PH3 valve closed
1/7/2013	2:16:51 PM	SiCl4 pre valve closed
1/7/2013	2:16:51 PM	SiCl4 post valve closed
1/7/2013	2:16:51 PM	Bypass valve closed
1/7/2013	2:16:51 PM	Bubbler valve closed
1/7/2013	2:16:51 PM	Helium valve opened
1/7/2013	2:16:51 PM	Main Vac valve opened
1/7/2013	2:16:51 PM	Helium MFC set to  20.000000
1/7/2013	2:16:51 PM	H2 MFC set to  0.000000
1/7/2013	2:16:51 PM	BCl3 MFC set to  0.000000
1/7/2013	2:16:51 PM	PH3 MFC set to  0.000000
1/7/2013	2:16:51 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:16:51 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:16:51 PM	Tube furnace set to 0
1/7/2013	2:17:21 PM	Helium valve closed
1/7/2013	2:17:21 PM	H2 valve closed
1/7/2013	2:17:21 PM	BCl3 valve closed
1/7/2013	2:17:21 PM	PH3 valve closed
1/7/2013	2:17:21 PM	SiCl4 pre valve closed
1/7/2013	2:17:21 PM	SiCl4 post valve closed
1/7/2013	2:17:21 PM	Bypass valve closed
1/7/2013	2:17:21 PM	Bubbler valve closed
1/7/2013	2:17:21 PM	Main Vac valve opened
1/7/2013	2:17:21 PM	Helium MFC set to  0.000000
1/7/2013	2:17:21 PM	H2 MFC set to  0.000000
1/7/2013	2:17:21 PM	BCl3 MFC set to  0.000000
1/7/2013	2:17:21 PM	PH3 MFC set to  0.000000
1/7/2013	2:17:21 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:17:21 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:17:21 PM	Tube furnace set to 0
1/7/2013	2:17:51 PM	H2 valve closed
1/7/2013	2:17:51 PM	BCl3 valve closed
1/7/2013	2:17:51 PM	PH3 valve closed
1/7/2013	2:17:51 PM	SiCl4 pre valve closed
1/7/2013	2:17:51 PM	SiCl4 post valve closed
1/7/2013	2:17:51 PM	Bypass valve closed
1/7/2013	2:17:51 PM	Bubbler valve closed
1/7/2013	2:17:51 PM	Helium valve opened
1/7/2013	2:17:51 PM	Main Vac valve opened
1/7/2013	2:17:51 PM	Helium MFC set to  20.000000
1/7/2013	2:17:51 PM	H2 MFC set to  0.000000
1/7/2013	2:17:51 PM	BCl3 MFC set to  0.000000
1/7/2013	2:17:51 PM	PH3 MFC set to  0.000000
1/7/2013	2:17:51 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:17:51 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:17:51 PM	Tube furnace set to 0
1/7/2013	2:18:21 PM	Helium valve closed
1/7/2013	2:18:21 PM	H2 valve closed
1/7/2013	2:18:21 PM	BCl3 valve closed
1/7/2013	2:18:21 PM	PH3 valve closed
1/7/2013	2:18:21 PM	SiCl4 pre valve closed
1/7/2013	2:18:21 PM	SiCl4 post valve closed
1/7/2013	2:18:21 PM	Bypass valve closed
1/7/2013	2:18:21 PM	Bubbler valve closed
1/7/2013	2:18:21 PM	Main Vac valve opened
1/7/2013	2:18:21 PM	Helium MFC set to  0.000000
1/7/2013	2:18:21 PM	H2 MFC set to  0.000000
1/7/2013	2:18:21 PM	BCl3 MFC set to  0.000000
1/7/2013	2:18:22 PM	PH3 MFC set to  0.000000
1/7/2013	2:18:22 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:18:22 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:18:22 PM	Tube furnace set to 0
1/7/2013	2:18:52 PM	H2 valve closed
1/7/2013	2:18:52 PM	BCl3 valve closed
1/7/2013	2:18:52 PM	PH3 valve closed
1/7/2013	2:18:52 PM	SiCl4 pre valve closed
1/7/2013	2:18:52 PM	SiCl4 post valve closed
1/7/2013	2:18:52 PM	Bypass valve closed
1/7/2013	2:18:52 PM	Bubbler valve closed
1/7/2013	2:18:52 PM	Helium valve opened
1/7/2013	2:18:52 PM	Main Vac valve opened
1/7/2013	2:18:52 PM	Helium MFC set to  20.000000
1/7/2013	2:18:52 PM	H2 MFC set to  0.000000
1/7/2013	2:18:52 PM	BCl3 MFC set to  0.000000
1/7/2013	2:18:52 PM	PH3 MFC set to  0.000000
1/7/2013	2:18:52 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:18:52 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:18:52 PM	Tube furnace set to 0
1/7/2013	2:19:22 PM	Helium valve closed
1/7/2013	2:19:22 PM	H2 valve closed
1/7/2013	2:19:22 PM	BCl3 valve closed
1/7/2013	2:19:22 PM	PH3 valve closed
1/7/2013	2:19:22 PM	SiCl4 pre valve closed
1/7/2013	2:19:22 PM	SiCl4 post valve closed
1/7/2013	2:19:22 PM	Bypass valve closed
1/7/2013	2:19:22 PM	Bubbler valve closed
1/7/2013	2:19:22 PM	Main Vac valve opened
1/7/2013	2:19:22 PM	Helium MFC set to  0.000000
1/7/2013	2:19:22 PM	H2 MFC set to  0.000000
1/7/2013	2:19:22 PM	BCl3 MFC set to  0.000000
1/7/2013	2:19:22 PM	PH3 MFC set to  0.000000
1/7/2013	2:19:22 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:19:22 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:19:22 PM	Tube furnace set to 0
1/7/2013	2:19:52 PM	H2 valve closed
1/7/2013	2:19:52 PM	BCl3 valve closed
1/7/2013	2:19:52 PM	PH3 valve closed
1/7/2013	2:19:52 PM	SiCl4 pre valve closed
1/7/2013	2:19:52 PM	SiCl4 post valve closed
1/7/2013	2:19:52 PM	Bypass valve closed
1/7/2013	2:19:52 PM	Bubbler valve closed
1/7/2013	2:19:52 PM	Helium valve opened
1/7/2013	2:19:52 PM	Main Vac valve opened
1/7/2013	2:19:52 PM	Helium MFC set to  20.000000
1/7/2013	2:19:52 PM	H2 MFC set to  0.000000
1/7/2013	2:19:52 PM	BCl3 MFC set to  0.000000
1/7/2013	2:19:52 PM	PH3 MFC set to  0.000000
1/7/2013	2:19:52 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:19:52 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:19:52 PM	Tube furnace set to 0
1/7/2013	2:20:22 PM	Helium valve closed
1/7/2013	2:20:22 PM	H2 valve closed
1/7/2013	2:20:22 PM	BCl3 valve closed
1/7/2013	2:20:22 PM	PH3 valve closed
1/7/2013	2:20:22 PM	SiCl4 pre valve closed
1/7/2013	2:20:23 PM	SiCl4 post valve closed
1/7/2013	2:20:23 PM	Bypass valve closed
1/7/2013	2:20:23 PM	Bubbler valve closed
1/7/2013	2:20:23 PM	Main Vac valve opened
1/7/2013	2:20:23 PM	Helium MFC set to  0.000000
1/7/2013	2:20:23 PM	H2 MFC set to  0.000000
1/7/2013	2:20:23 PM	BCl3 MFC set to  0.000000
1/7/2013	2:20:23 PM	PH3 MFC set to  0.000000
1/7/2013	2:20:23 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:20:23 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:20:23 PM	Tube furnace set to 0
1/7/2013	2:20:53 PM	H2 valve closed
1/7/2013	2:20:53 PM	BCl3 valve closed
1/7/2013	2:20:53 PM	PH3 valve closed
1/7/2013	2:20:53 PM	SiCl4 pre valve closed
1/7/2013	2:20:53 PM	SiCl4 post valve closed
1/7/2013	2:20:53 PM	Bypass valve closed
1/7/2013	2:20:53 PM	Bubbler valve closed
1/7/2013	2:20:53 PM	Helium valve opened
1/7/2013	2:20:53 PM	Main Vac valve opened
1/7/2013	2:20:53 PM	Helium MFC set to  20.000000
1/7/2013	2:20:53 PM	H2 MFC set to  0.000000
1/7/2013	2:20:53 PM	BCl3 MFC set to  0.000000
1/7/2013	2:20:53 PM	PH3 MFC set to  0.000000
1/7/2013	2:20:53 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:20:53 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:20:53 PM	Tube furnace set to 0
1/7/2013	2:21:23 PM	Helium valve closed
1/7/2013	2:21:23 PM	H2 valve closed
1/7/2013	2:21:23 PM	BCl3 valve closed
1/7/2013	2:21:23 PM	PH3 valve closed
1/7/2013	2:21:23 PM	SiCl4 pre valve closed
1/7/2013	2:21:23 PM	SiCl4 post valve closed
1/7/2013	2:21:23 PM	Bypass valve closed
1/7/2013	2:21:23 PM	Bubbler valve closed
1/7/2013	2:21:23 PM	Main Vac valve opened
1/7/2013	2:21:23 PM	Helium MFC set to  0.000000
1/7/2013	2:21:23 PM	H2 MFC set to  0.000000
1/7/2013	2:21:23 PM	BCl3 MFC set to  0.000000
1/7/2013	2:21:23 PM	PH3 MFC set to  0.000000
1/7/2013	2:21:23 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:21:23 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:21:23 PM	Tube furnace set to 0
1/7/2013	2:21:53 PM	H2 valve closed
1/7/2013	2:21:53 PM	BCl3 valve closed
1/7/2013	2:21:53 PM	PH3 valve closed
1/7/2013	2:21:53 PM	SiCl4 pre valve closed
1/7/2013	2:21:53 PM	SiCl4 post valve closed
1/7/2013	2:21:53 PM	Bypass valve closed
1/7/2013	2:21:53 PM	Bubbler valve closed
1/7/2013	2:21:53 PM	Helium valve opened
1/7/2013	2:21:53 PM	Main Vac valve opened
1/7/2013	2:21:53 PM	Helium MFC set to  20.000000
1/7/2013	2:21:53 PM	H2 MFC set to  0.000000
1/7/2013	2:21:53 PM	BCl3 MFC set to  0.000000
1/7/2013	2:21:53 PM	PH3 MFC set to  0.000000
1/7/2013	2:21:53 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:21:53 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:21:53 PM	Tube furnace set to 0
1/7/2013	2:22:23 PM	Helium valve closed
1/7/2013	2:22:23 PM	H2 valve closed
1/7/2013	2:22:23 PM	BCl3 valve closed
1/7/2013	2:22:23 PM	PH3 valve closed
1/7/2013	2:22:23 PM	SiCl4 pre valve closed
1/7/2013	2:22:23 PM	SiCl4 post valve closed
1/7/2013	2:22:23 PM	Bypass valve closed
1/7/2013	2:22:23 PM	Bubbler valve closed
1/7/2013	2:22:23 PM	Main Vac valve opened
1/7/2013	2:22:23 PM	Helium MFC set to  0.000000
1/7/2013	2:22:23 PM	H2 MFC set to  0.000000
1/7/2013	2:22:23 PM	BCl3 MFC set to  0.000000
1/7/2013	2:22:23 PM	PH3 MFC set to  0.000000
1/7/2013	2:22:23 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:22:23 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:22:24 PM	Tube furnace set to 0
1/7/2013	2:22:53 PM	H2 valve closed
1/7/2013	2:22:53 PM	BCl3 valve closed
1/7/2013	2:22:53 PM	PH3 valve closed
1/7/2013	2:22:53 PM	SiCl4 pre valve closed
1/7/2013	2:22:53 PM	SiCl4 post valve closed
1/7/2013	2:22:53 PM	Bypass valve closed
1/7/2013	2:22:53 PM	Bubbler valve closed
1/7/2013	2:22:54 PM	Helium valve opened
1/7/2013	2:22:54 PM	Main Vac valve opened
1/7/2013	2:22:54 PM	Helium MFC set to  20.000000
1/7/2013	2:22:54 PM	H2 MFC set to  0.000000
1/7/2013	2:22:54 PM	BCl3 MFC set to  0.000000
1/7/2013	2:22:54 PM	PH3 MFC set to  0.000000
1/7/2013	2:22:54 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:22:54 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:22:54 PM	Tube furnace set to 0
1/7/2013	2:23:24 PM	Helium valve closed
1/7/2013	2:23:24 PM	H2 valve closed
1/7/2013	2:23:24 PM	BCl3 valve closed
1/7/2013	2:23:24 PM	PH3 valve closed
1/7/2013	2:23:24 PM	SiCl4 pre valve closed
1/7/2013	2:23:24 PM	SiCl4 post valve closed
1/7/2013	2:23:24 PM	Bypass valve closed
1/7/2013	2:23:24 PM	Bubbler valve closed
1/7/2013	2:23:24 PM	Main Vac valve opened
1/7/2013	2:23:24 PM	Helium MFC set to  0.000000
1/7/2013	2:23:24 PM	H2 MFC set to  0.000000
1/7/2013	2:23:24 PM	BCl3 MFC set to  0.000000
1/7/2013	2:23:24 PM	PH3 MFC set to  0.000000
1/7/2013	2:23:24 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:23:24 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:23:24 PM	Tube furnace set to 0
1/7/2013	2:23:25 PM	Run finished at 2:23 PM
1/7/2013	2:23:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/7/2013	2:23:58 PM	Recipe started at 2:23 PM
1/7/2013	2:23:58 PM	Helium valve closed
1/7/2013	2:23:58 PM	H2 valve closed
1/7/2013	2:23:58 PM	BCl3 valve closed
1/7/2013	2:23:58 PM	PH3 valve closed
1/7/2013	2:23:58 PM	SiCl4 pre valve closed
1/7/2013	2:23:58 PM	SiCl4 post valve closed
1/7/2013	2:23:58 PM	Bypass valve closed
1/7/2013	2:23:58 PM	Bubbler valve closed
1/7/2013	2:23:58 PM	Main Vac valve opened
1/7/2013	2:23:58 PM	Helium MFC set to  0.000000
1/7/2013	2:23:58 PM	H2 MFC set to  0.000000
1/7/2013	2:23:58 PM	BCl3 MFC set to  0.000000
1/7/2013	2:23:58 PM	PH3 MFC set to  0.000000
1/7/2013	2:23:58 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:23:58 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:23:58 PM	Tube furnace set to 150
1/7/2013	2:24:28 PM	H2 valve closed
1/7/2013	2:24:28 PM	BCl3 valve closed
1/7/2013	2:24:28 PM	PH3 valve closed
1/7/2013	2:24:28 PM	SiCl4 pre valve closed
1/7/2013	2:24:28 PM	SiCl4 post valve closed
1/7/2013	2:24:28 PM	Bypass valve closed
1/7/2013	2:24:28 PM	Bubbler valve closed
1/7/2013	2:24:28 PM	Helium valve opened
1/7/2013	2:24:28 PM	Main Vac valve opened
1/7/2013	2:24:28 PM	Helium MFC set to  20.000000
1/7/2013	2:24:28 PM	H2 MFC set to  0.000000
1/7/2013	2:24:28 PM	BCl3 MFC set to  0.000000
1/7/2013	2:24:28 PM	PH3 MFC set to  0.000000
1/7/2013	2:24:28 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:24:28 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:24:28 PM	Tube furnace set to 150
1/7/2013	2:24:58 PM	Helium valve closed
1/7/2013	2:24:58 PM	H2 valve closed
1/7/2013	2:24:58 PM	BCl3 valve closed
1/7/2013	2:24:58 PM	PH3 valve closed
1/7/2013	2:24:58 PM	SiCl4 pre valve closed
1/7/2013	2:24:58 PM	SiCl4 post valve closed
1/7/2013	2:24:58 PM	Bypass valve closed
1/7/2013	2:24:58 PM	Bubbler valve closed
1/7/2013	2:24:58 PM	Main Vac valve opened
1/7/2013	2:24:58 PM	Helium MFC set to  0.000000
1/7/2013	2:24:58 PM	H2 MFC set to  0.000000
1/7/2013	2:24:58 PM	BCl3 MFC set to  0.000000
1/7/2013	2:24:58 PM	PH3 MFC set to  0.000000
1/7/2013	2:24:58 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:24:58 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:24:59 PM	Tube furnace set to 150
1/7/2013	2:25:29 PM	H2 valve closed
1/7/2013	2:25:29 PM	BCl3 valve closed
1/7/2013	2:25:29 PM	PH3 valve closed
1/7/2013	2:25:29 PM	SiCl4 pre valve closed
1/7/2013	2:25:29 PM	SiCl4 post valve closed
1/7/2013	2:25:29 PM	Bypass valve closed
1/7/2013	2:25:29 PM	Bubbler valve closed
1/7/2013	2:25:29 PM	Helium valve opened
1/7/2013	2:25:29 PM	Main Vac valve opened
1/7/2013	2:25:29 PM	Helium MFC set to  20.000000
1/7/2013	2:25:29 PM	H2 MFC set to  0.000000
1/7/2013	2:25:29 PM	BCl3 MFC set to  0.000000
1/7/2013	2:25:29 PM	PH3 MFC set to  0.000000
1/7/2013	2:25:29 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:25:29 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:25:29 PM	Tube furnace set to 150
1/7/2013	2:25:59 PM	Helium valve closed
1/7/2013	2:25:59 PM	H2 valve closed
1/7/2013	2:25:59 PM	BCl3 valve closed
1/7/2013	2:25:59 PM	PH3 valve closed
1/7/2013	2:25:59 PM	SiCl4 pre valve closed
1/7/2013	2:25:59 PM	SiCl4 post valve closed
1/7/2013	2:25:59 PM	Bypass valve closed
1/7/2013	2:25:59 PM	Bubbler valve closed
1/7/2013	2:25:59 PM	Main Vac valve opened
1/7/2013	2:25:59 PM	Helium MFC set to  0.000000
1/7/2013	2:25:59 PM	H2 MFC set to  0.000000
1/7/2013	2:25:59 PM	BCl3 MFC set to  0.000000
1/7/2013	2:25:59 PM	PH3 MFC set to  0.000000
1/7/2013	2:25:59 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:25:59 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:25:59 PM	Tube furnace set to 150
1/7/2013	2:26:29 PM	H2 valve closed
1/7/2013	2:26:29 PM	BCl3 valve closed
1/7/2013	2:26:29 PM	PH3 valve closed
1/7/2013	2:26:29 PM	SiCl4 pre valve closed
1/7/2013	2:26:29 PM	SiCl4 post valve closed
1/7/2013	2:26:29 PM	Bypass valve closed
1/7/2013	2:26:29 PM	Bubbler valve closed
1/7/2013	2:26:29 PM	Helium valve opened
1/7/2013	2:26:29 PM	Main Vac valve opened
1/7/2013	2:26:29 PM	Helium MFC set to  20.000000
1/7/2013	2:26:29 PM	H2 MFC set to  0.000000
1/7/2013	2:26:29 PM	BCl3 MFC set to  0.000000
1/7/2013	2:26:29 PM	PH3 MFC set to  0.000000
1/7/2013	2:26:29 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:26:29 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:26:29 PM	Tube furnace set to 150
1/7/2013	2:26:59 PM	Helium valve closed
1/7/2013	2:26:59 PM	H2 valve closed
1/7/2013	2:26:59 PM	BCl3 valve closed
1/7/2013	2:26:59 PM	PH3 valve closed
1/7/2013	2:26:59 PM	SiCl4 pre valve closed
1/7/2013	2:26:59 PM	SiCl4 post valve closed
1/7/2013	2:26:59 PM	Bypass valve closed
1/7/2013	2:26:59 PM	Bubbler valve closed
1/7/2013	2:26:59 PM	Main Vac valve opened
1/7/2013	2:26:59 PM	Helium MFC set to  0.000000
1/7/2013	2:26:59 PM	H2 MFC set to  0.000000
1/7/2013	2:26:59 PM	BCl3 MFC set to  0.000000
1/7/2013	2:26:59 PM	PH3 MFC set to  0.000000
1/7/2013	2:26:59 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:26:59 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:27:00 PM	Tube furnace set to 150
1/7/2013	2:27:30 PM	H2 valve closed
1/7/2013	2:27:30 PM	BCl3 valve closed
1/7/2013	2:27:30 PM	PH3 valve closed
1/7/2013	2:27:30 PM	SiCl4 pre valve closed
1/7/2013	2:27:30 PM	SiCl4 post valve closed
1/7/2013	2:27:30 PM	Bypass valve closed
1/7/2013	2:27:30 PM	Bubbler valve closed
1/7/2013	2:27:30 PM	Helium valve opened
1/7/2013	2:27:30 PM	Main Vac valve opened
1/7/2013	2:27:30 PM	Helium MFC set to  20.000000
1/7/2013	2:27:30 PM	H2 MFC set to  0.000000
1/7/2013	2:27:30 PM	BCl3 MFC set to  0.000000
1/7/2013	2:27:30 PM	PH3 MFC set to  0.000000
1/7/2013	2:27:30 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:27:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:27:30 PM	Tube furnace set to 150
1/7/2013	2:28:00 PM	Helium valve closed
1/7/2013	2:28:00 PM	H2 valve closed
1/7/2013	2:28:00 PM	BCl3 valve closed
1/7/2013	2:28:00 PM	PH3 valve closed
1/7/2013	2:28:00 PM	SiCl4 pre valve closed
1/7/2013	2:28:00 PM	SiCl4 post valve closed
1/7/2013	2:28:00 PM	Bypass valve closed
1/7/2013	2:28:00 PM	Bubbler valve closed
1/7/2013	2:28:00 PM	Main Vac valve opened
1/7/2013	2:28:00 PM	Helium MFC set to  0.000000
1/7/2013	2:28:00 PM	H2 MFC set to  0.000000
1/7/2013	2:28:00 PM	BCl3 MFC set to  0.000000
1/7/2013	2:28:00 PM	PH3 MFC set to  0.000000
1/7/2013	2:28:00 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:28:00 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:28:00 PM	Tube furnace set to 150
1/7/2013	2:28:30 PM	H2 valve closed
1/7/2013	2:28:30 PM	BCl3 valve closed
1/7/2013	2:28:30 PM	PH3 valve closed
1/7/2013	2:28:30 PM	SiCl4 pre valve closed
1/7/2013	2:28:30 PM	SiCl4 post valve closed
1/7/2013	2:28:30 PM	Bypass valve closed
1/7/2013	2:28:30 PM	Bubbler valve closed
1/7/2013	2:28:30 PM	Helium valve opened
1/7/2013	2:28:30 PM	Main Vac valve opened
1/7/2013	2:28:30 PM	Helium MFC set to  20.000000
1/7/2013	2:28:30 PM	H2 MFC set to  0.000000
1/7/2013	2:28:30 PM	BCl3 MFC set to  0.000000
1/7/2013	2:28:30 PM	PH3 MFC set to  0.000000
1/7/2013	2:28:30 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:28:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:28:30 PM	Tube furnace set to 150
1/7/2013	2:29:00 PM	Helium valve closed
1/7/2013	2:29:00 PM	H2 valve closed
1/7/2013	2:29:00 PM	BCl3 valve closed
1/7/2013	2:29:00 PM	PH3 valve closed
1/7/2013	2:29:00 PM	SiCl4 pre valve closed
1/7/2013	2:29:00 PM	SiCl4 post valve closed
1/7/2013	2:29:00 PM	Bypass valve closed
1/7/2013	2:29:00 PM	Bubbler valve closed
1/7/2013	2:29:00 PM	Main Vac valve opened
1/7/2013	2:29:00 PM	Helium MFC set to  0.000000
1/7/2013	2:29:00 PM	H2 MFC set to  0.000000
1/7/2013	2:29:00 PM	BCl3 MFC set to  0.000000
1/7/2013	2:29:00 PM	PH3 MFC set to  0.000000
1/7/2013	2:29:00 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:29:01 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:29:01 PM	Tube furnace set to 150
1/7/2013	2:29:31 PM	H2 valve closed
1/7/2013	2:29:31 PM	BCl3 valve closed
1/7/2013	2:29:31 PM	PH3 valve closed
1/7/2013	2:29:31 PM	SiCl4 pre valve closed
1/7/2013	2:29:31 PM	SiCl4 post valve closed
1/7/2013	2:29:31 PM	Bypass valve closed
1/7/2013	2:29:31 PM	Bubbler valve closed
1/7/2013	2:29:31 PM	Helium valve opened
1/7/2013	2:29:31 PM	Main Vac valve opened
1/7/2013	2:29:31 PM	Helium MFC set to  20.000000
1/7/2013	2:29:31 PM	H2 MFC set to  0.000000
1/7/2013	2:29:31 PM	BCl3 MFC set to  0.000000
1/7/2013	2:29:31 PM	PH3 MFC set to  0.000000
1/7/2013	2:29:31 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:29:31 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:29:31 PM	Tube furnace set to 150
1/7/2013	2:30:01 PM	Helium valve closed
1/7/2013	2:30:01 PM	H2 valve closed
1/7/2013	2:30:01 PM	BCl3 valve closed
1/7/2013	2:30:01 PM	PH3 valve closed
1/7/2013	2:30:01 PM	SiCl4 pre valve closed
1/7/2013	2:30:01 PM	SiCl4 post valve closed
1/7/2013	2:30:01 PM	Bypass valve closed
1/7/2013	2:30:01 PM	Bubbler valve closed
1/7/2013	2:30:01 PM	Main Vac valve opened
1/7/2013	2:30:01 PM	Helium MFC set to  0.000000
1/7/2013	2:30:01 PM	H2 MFC set to  0.000000
1/7/2013	2:30:01 PM	BCl3 MFC set to  0.000000
1/7/2013	2:30:01 PM	PH3 MFC set to  0.000000
1/7/2013	2:30:01 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:30:01 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:30:01 PM	Tube furnace set to 150
1/7/2013	2:30:31 PM	H2 valve closed
1/7/2013	2:30:31 PM	BCl3 valve closed
1/7/2013	2:30:31 PM	PH3 valve closed
1/7/2013	2:30:31 PM	SiCl4 pre valve closed
1/7/2013	2:30:31 PM	SiCl4 post valve closed
1/7/2013	2:30:31 PM	Bypass valve closed
1/7/2013	2:30:31 PM	Bubbler valve closed
1/7/2013	2:30:31 PM	Helium valve opened
1/7/2013	2:30:31 PM	Main Vac valve opened
1/7/2013	2:30:31 PM	Helium MFC set to  20.000000
1/7/2013	2:30:31 PM	H2 MFC set to  0.000000
1/7/2013	2:30:31 PM	BCl3 MFC set to  0.000000
1/7/2013	2:30:31 PM	PH3 MFC set to  0.000000
1/7/2013	2:30:31 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:30:31 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:30:31 PM	Tube furnace set to 150
1/7/2013	2:31:01 PM	Helium valve closed
1/7/2013	2:31:01 PM	H2 valve closed
1/7/2013	2:31:01 PM	BCl3 valve closed
1/7/2013	2:31:01 PM	PH3 valve closed
1/7/2013	2:31:01 PM	SiCl4 pre valve closed
1/7/2013	2:31:01 PM	SiCl4 post valve closed
1/7/2013	2:31:01 PM	Bypass valve closed
1/7/2013	2:31:01 PM	Bubbler valve closed
1/7/2013	2:31:01 PM	Main Vac valve opened
1/7/2013	2:31:01 PM	Helium MFC set to  0.000000
1/7/2013	2:31:01 PM	H2 MFC set to  0.000000
1/7/2013	2:31:01 PM	BCl3 MFC set to  0.000000
1/7/2013	2:31:02 PM	PH3 MFC set to  0.000000
1/7/2013	2:31:02 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:31:02 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:31:02 PM	Tube furnace set to 150
1/7/2013	2:31:32 PM	H2 valve closed
1/7/2013	2:31:32 PM	BCl3 valve closed
1/7/2013	2:31:32 PM	PH3 valve closed
1/7/2013	2:31:32 PM	SiCl4 pre valve closed
1/7/2013	2:31:32 PM	SiCl4 post valve closed
1/7/2013	2:31:32 PM	Bypass valve closed
1/7/2013	2:31:32 PM	Bubbler valve closed
1/7/2013	2:31:32 PM	Helium valve opened
1/7/2013	2:31:32 PM	Main Vac valve opened
1/7/2013	2:31:32 PM	Helium MFC set to  20.000000
1/7/2013	2:31:32 PM	H2 MFC set to  0.000000
1/7/2013	2:31:32 PM	BCl3 MFC set to  0.000000
1/7/2013	2:31:32 PM	PH3 MFC set to  0.000000
1/7/2013	2:31:32 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:31:32 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:31:32 PM	Tube furnace set to 150
1/7/2013	2:32:02 PM	Helium valve closed
1/7/2013	2:32:02 PM	H2 valve closed
1/7/2013	2:32:02 PM	BCl3 valve closed
1/7/2013	2:32:02 PM	PH3 valve closed
1/7/2013	2:32:02 PM	SiCl4 pre valve closed
1/7/2013	2:32:02 PM	SiCl4 post valve closed
1/7/2013	2:32:02 PM	Bypass valve closed
1/7/2013	2:32:02 PM	Bubbler valve closed
1/7/2013	2:32:02 PM	Main Vac valve opened
1/7/2013	2:32:02 PM	Helium MFC set to  0.000000
1/7/2013	2:32:02 PM	H2 MFC set to  0.000000
1/7/2013	2:32:02 PM	BCl3 MFC set to  0.000000
1/7/2013	2:32:02 PM	PH3 MFC set to  0.000000
1/7/2013	2:32:02 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:32:02 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:32:02 PM	Tube furnace set to 150
1/7/2013	2:32:32 PM	H2 valve closed
1/7/2013	2:32:32 PM	BCl3 valve closed
1/7/2013	2:32:32 PM	PH3 valve closed
1/7/2013	2:32:32 PM	SiCl4 pre valve closed
1/7/2013	2:32:32 PM	SiCl4 post valve closed
1/7/2013	2:32:32 PM	Bypass valve closed
1/7/2013	2:32:32 PM	Bubbler valve closed
1/7/2013	2:32:32 PM	Helium valve opened
1/7/2013	2:32:32 PM	Main Vac valve opened
1/7/2013	2:32:32 PM	Helium MFC set to  20.000000
1/7/2013	2:32:32 PM	H2 MFC set to  0.000000
1/7/2013	2:32:32 PM	BCl3 MFC set to  0.000000
1/7/2013	2:32:32 PM	PH3 MFC set to  0.000000
1/7/2013	2:32:32 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:32:32 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:32:32 PM	Tube furnace set to 150
1/7/2013	2:33:02 PM	Helium valve closed
1/7/2013	2:33:02 PM	H2 valve closed
1/7/2013	2:33:02 PM	BCl3 valve closed
1/7/2013	2:33:02 PM	PH3 valve closed
1/7/2013	2:33:02 PM	SiCl4 pre valve closed
1/7/2013	2:33:02 PM	SiCl4 post valve closed
1/7/2013	2:33:02 PM	Bypass valve closed
1/7/2013	2:33:02 PM	Bubbler valve closed
1/7/2013	2:33:02 PM	Main Vac valve opened
1/7/2013	2:33:02 PM	Helium MFC set to  0.000000
1/7/2013	2:33:02 PM	H2 MFC set to  0.000000
1/7/2013	2:33:02 PM	BCl3 MFC set to  0.000000
1/7/2013	2:33:02 PM	PH3 MFC set to  0.000000
1/7/2013	2:33:02 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:33:02 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:33:02 PM	Tube furnace set to 150
1/7/2013	2:33:32 PM	H2 valve closed
1/7/2013	2:33:32 PM	BCl3 valve closed
1/7/2013	2:33:32 PM	PH3 valve closed
1/7/2013	2:33:33 PM	SiCl4 pre valve closed
1/7/2013	2:33:33 PM	SiCl4 post valve closed
1/7/2013	2:33:33 PM	Bypass valve closed
1/7/2013	2:33:33 PM	Bubbler valve closed
1/7/2013	2:33:33 PM	Helium valve opened
1/7/2013	2:33:33 PM	Main Vac valve opened
1/7/2013	2:33:33 PM	Helium MFC set to  20.000000
1/7/2013	2:33:33 PM	H2 MFC set to  0.000000
1/7/2013	2:33:33 PM	BCl3 MFC set to  0.000000
1/7/2013	2:33:33 PM	PH3 MFC set to  0.000000
1/7/2013	2:33:33 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:33:33 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:33:33 PM	Tube furnace set to 150
1/7/2013	2:34:03 PM	Helium valve closed
1/7/2013	2:34:03 PM	H2 valve closed
1/7/2013	2:34:03 PM	BCl3 valve closed
1/7/2013	2:34:03 PM	PH3 valve closed
1/7/2013	2:34:03 PM	SiCl4 pre valve closed
1/7/2013	2:34:03 PM	SiCl4 post valve closed
1/7/2013	2:34:03 PM	Bypass valve closed
1/7/2013	2:34:03 PM	Bubbler valve closed
1/7/2013	2:34:03 PM	Main Vac valve opened
1/7/2013	2:34:03 PM	Helium MFC set to  0.000000
1/7/2013	2:34:03 PM	H2 MFC set to  0.000000
1/7/2013	2:34:03 PM	BCl3 MFC set to  0.000000
1/7/2013	2:34:03 PM	PH3 MFC set to  0.000000
1/7/2013	2:34:03 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:34:03 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:34:03 PM	Tube furnace set to 150
1/7/2013	2:34:04 PM	Run finished at 2:34 PM
1/7/2013	2:34:55 PM	Main Vac valve closed
1/7/2013	2:35:52 PM	Recipe started at 2:35 PM
1/7/2013	2:35:52 PM	Helium valve closed
1/7/2013	2:35:52 PM	H2 valve closed
1/7/2013	2:35:52 PM	BCl3 valve closed
1/7/2013	2:35:52 PM	PH3 valve closed
1/7/2013	2:35:52 PM	SiCl4 pre valve closed
1/7/2013	2:35:52 PM	SiCl4 post valve closed
1/7/2013	2:35:52 PM	Bypass valve closed
1/7/2013	2:35:52 PM	Bubbler valve closed
1/7/2013	2:35:52 PM	Main Vac valve opened
1/7/2013	2:35:52 PM	Helium MFC set to  0.000000
1/7/2013	2:35:52 PM	H2 MFC set to  0.000000
1/7/2013	2:35:52 PM	BCl3 MFC set to  0.000000
1/7/2013	2:35:52 PM	PH3 MFC set to  0.000000
1/7/2013	2:35:52 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:35:52 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:35:53 PM	Tube furnace set to 150
1/7/2013	2:36:23 PM	H2 valve closed
1/7/2013	2:36:23 PM	BCl3 valve closed
1/7/2013	2:36:23 PM	PH3 valve closed
1/7/2013	2:36:23 PM	SiCl4 pre valve closed
1/7/2013	2:36:23 PM	SiCl4 post valve closed
1/7/2013	2:36:23 PM	Bypass valve closed
1/7/2013	2:36:23 PM	Bubbler valve closed
1/7/2013	2:36:23 PM	Helium valve opened
1/7/2013	2:36:23 PM	Main Vac valve opened
1/7/2013	2:36:23 PM	Helium MFC set to  20.000000
1/7/2013	2:36:23 PM	H2 MFC set to  0.000000
1/7/2013	2:36:23 PM	BCl3 MFC set to  0.000000
1/7/2013	2:36:23 PM	PH3 MFC set to  0.000000
1/7/2013	2:36:23 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:36:23 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:36:23 PM	Tube furnace set to 150
1/7/2013	2:36:53 PM	Helium valve closed
1/7/2013	2:36:53 PM	H2 valve closed
1/7/2013	2:36:53 PM	BCl3 valve closed
1/7/2013	2:36:53 PM	PH3 valve closed
1/7/2013	2:36:53 PM	SiCl4 pre valve closed
1/7/2013	2:36:53 PM	SiCl4 post valve closed
1/7/2013	2:36:53 PM	Bypass valve closed
1/7/2013	2:36:53 PM	Bubbler valve closed
1/7/2013	2:36:53 PM	Main Vac valve opened
1/7/2013	2:36:53 PM	Helium MFC set to  0.000000
1/7/2013	2:36:53 PM	H2 MFC set to  0.000000
1/7/2013	2:36:53 PM	BCl3 MFC set to  0.000000
1/7/2013	2:36:53 PM	PH3 MFC set to  0.000000
1/7/2013	2:36:53 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:36:53 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:36:53 PM	Tube furnace set to 150
1/7/2013	2:37:23 PM	H2 valve closed
1/7/2013	2:37:23 PM	BCl3 valve closed
1/7/2013	2:37:23 PM	PH3 valve closed
1/7/2013	2:37:23 PM	SiCl4 pre valve closed
1/7/2013	2:37:23 PM	SiCl4 post valve closed
1/7/2013	2:37:23 PM	Bypass valve closed
1/7/2013	2:37:23 PM	Bubbler valve closed
1/7/2013	2:37:23 PM	Helium valve opened
1/7/2013	2:37:23 PM	Main Vac valve opened
1/7/2013	2:37:23 PM	Helium MFC set to  20.000000
1/7/2013	2:37:23 PM	H2 MFC set to  0.000000
1/7/2013	2:37:23 PM	BCl3 MFC set to  0.000000
1/7/2013	2:37:23 PM	PH3 MFC set to  0.000000
1/7/2013	2:37:23 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:37:23 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:37:23 PM	Tube furnace set to 150
1/7/2013	2:37:53 PM	Helium valve closed
1/7/2013	2:37:53 PM	H2 valve closed
1/7/2013	2:37:53 PM	BCl3 valve closed
1/7/2013	2:37:53 PM	PH3 valve closed
1/7/2013	2:37:53 PM	SiCl4 pre valve closed
1/7/2013	2:37:53 PM	SiCl4 post valve closed
1/7/2013	2:37:53 PM	Bypass valve closed
1/7/2013	2:37:53 PM	Bubbler valve closed
1/7/2013	2:37:53 PM	Main Vac valve opened
1/7/2013	2:37:53 PM	Helium MFC set to  0.000000
1/7/2013	2:37:53 PM	H2 MFC set to  0.000000
1/7/2013	2:37:53 PM	BCl3 MFC set to  0.000000
1/7/2013	2:37:53 PM	PH3 MFC set to  0.000000
1/7/2013	2:37:53 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:37:53 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:37:53 PM	Tube furnace set to 150
1/7/2013	2:38:24 PM	H2 valve closed
1/7/2013	2:38:24 PM	BCl3 valve closed
1/7/2013	2:38:24 PM	PH3 valve closed
1/7/2013	2:38:24 PM	SiCl4 pre valve closed
1/7/2013	2:38:24 PM	SiCl4 post valve closed
1/7/2013	2:38:24 PM	Bypass valve closed
1/7/2013	2:38:24 PM	Bubbler valve closed
1/7/2013	2:38:24 PM	Helium valve opened
1/7/2013	2:38:24 PM	Main Vac valve opened
1/7/2013	2:38:24 PM	Helium MFC set to  20.000000
1/7/2013	2:38:24 PM	H2 MFC set to  0.000000
1/7/2013	2:38:24 PM	BCl3 MFC set to  0.000000
1/7/2013	2:38:24 PM	PH3 MFC set to  0.000000
1/7/2013	2:38:24 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:38:24 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:38:24 PM	Tube furnace set to 150
1/7/2013	2:38:54 PM	Helium valve closed
1/7/2013	2:38:54 PM	H2 valve closed
1/7/2013	2:38:54 PM	BCl3 valve closed
1/7/2013	2:38:54 PM	PH3 valve closed
1/7/2013	2:38:54 PM	SiCl4 pre valve closed
1/7/2013	2:38:54 PM	SiCl4 post valve closed
1/7/2013	2:38:54 PM	Bypass valve closed
1/7/2013	2:38:54 PM	Bubbler valve closed
1/7/2013	2:38:54 PM	Main Vac valve opened
1/7/2013	2:38:54 PM	Helium MFC set to  0.000000
1/7/2013	2:38:54 PM	H2 MFC set to  0.000000
1/7/2013	2:38:54 PM	BCl3 MFC set to  0.000000
1/7/2013	2:38:54 PM	PH3 MFC set to  0.000000
1/7/2013	2:38:54 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:38:54 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:38:54 PM	Tube furnace set to 150
1/7/2013	2:39:24 PM	H2 valve closed
1/7/2013	2:39:24 PM	BCl3 valve closed
1/7/2013	2:39:24 PM	PH3 valve closed
1/7/2013	2:39:24 PM	SiCl4 pre valve closed
1/7/2013	2:39:24 PM	SiCl4 post valve closed
1/7/2013	2:39:24 PM	Bypass valve closed
1/7/2013	2:39:24 PM	Bubbler valve closed
1/7/2013	2:39:24 PM	Helium valve opened
1/7/2013	2:39:24 PM	Main Vac valve opened
1/7/2013	2:39:24 PM	Helium MFC set to  20.000000
1/7/2013	2:39:24 PM	H2 MFC set to  0.000000
1/7/2013	2:39:24 PM	BCl3 MFC set to  0.000000
1/7/2013	2:39:24 PM	PH3 MFC set to  0.000000
1/7/2013	2:39:24 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:39:24 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:39:24 PM	Tube furnace set to 150
1/7/2013	2:39:54 PM	Helium valve closed
1/7/2013	2:39:54 PM	H2 valve closed
1/7/2013	2:39:54 PM	BCl3 valve closed
1/7/2013	2:39:54 PM	PH3 valve closed
1/7/2013	2:39:54 PM	SiCl4 pre valve closed
1/7/2013	2:39:54 PM	SiCl4 post valve closed
1/7/2013	2:39:54 PM	Bypass valve closed
1/7/2013	2:39:54 PM	Bubbler valve closed
1/7/2013	2:39:54 PM	Main Vac valve opened
1/7/2013	2:39:54 PM	Helium MFC set to  0.000000
1/7/2013	2:39:54 PM	H2 MFC set to  0.000000
1/7/2013	2:39:54 PM	BCl3 MFC set to  0.000000
1/7/2013	2:39:54 PM	PH3 MFC set to  0.000000
1/7/2013	2:39:54 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:39:54 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:39:55 PM	Tube furnace set to 150
1/7/2013	2:40:25 PM	H2 valve closed
1/7/2013	2:40:25 PM	BCl3 valve closed
1/7/2013	2:40:25 PM	PH3 valve closed
1/7/2013	2:40:25 PM	SiCl4 pre valve closed
1/7/2013	2:40:25 PM	SiCl4 post valve closed
1/7/2013	2:40:25 PM	Bypass valve closed
1/7/2013	2:40:25 PM	Bubbler valve closed
1/7/2013	2:40:25 PM	Helium valve opened
1/7/2013	2:40:25 PM	Main Vac valve opened
1/7/2013	2:40:25 PM	Helium MFC set to  20.000000
1/7/2013	2:40:25 PM	H2 MFC set to  0.000000
1/7/2013	2:40:25 PM	BCl3 MFC set to  0.000000
1/7/2013	2:40:25 PM	PH3 MFC set to  0.000000
1/7/2013	2:40:25 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:40:25 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:40:25 PM	Tube furnace set to 150
1/7/2013	2:40:55 PM	Helium valve closed
1/7/2013	2:40:55 PM	H2 valve closed
1/7/2013	2:40:55 PM	BCl3 valve closed
1/7/2013	2:40:55 PM	PH3 valve closed
1/7/2013	2:40:55 PM	SiCl4 pre valve closed
1/7/2013	2:40:55 PM	SiCl4 post valve closed
1/7/2013	2:40:55 PM	Bypass valve closed
1/7/2013	2:40:55 PM	Bubbler valve closed
1/7/2013	2:40:55 PM	Main Vac valve opened
1/7/2013	2:40:55 PM	Helium MFC set to  0.000000
1/7/2013	2:40:55 PM	H2 MFC set to  0.000000
1/7/2013	2:40:55 PM	BCl3 MFC set to  0.000000
1/7/2013	2:40:55 PM	PH3 MFC set to  0.000000
1/7/2013	2:40:55 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:40:55 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:40:55 PM	Tube furnace set to 150
1/7/2013	2:41:25 PM	H2 valve closed
1/7/2013	2:41:25 PM	BCl3 valve closed
1/7/2013	2:41:25 PM	PH3 valve closed
1/7/2013	2:41:25 PM	SiCl4 pre valve closed
1/7/2013	2:41:25 PM	SiCl4 post valve closed
1/7/2013	2:41:25 PM	Bypass valve closed
1/7/2013	2:41:25 PM	Bubbler valve closed
1/7/2013	2:41:25 PM	Helium valve opened
1/7/2013	2:41:25 PM	Main Vac valve opened
1/7/2013	2:41:25 PM	Helium MFC set to  20.000000
1/7/2013	2:41:25 PM	H2 MFC set to  0.000000
1/7/2013	2:41:25 PM	BCl3 MFC set to  0.000000
1/7/2013	2:41:25 PM	PH3 MFC set to  0.000000
1/7/2013	2:41:25 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:41:25 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:41:25 PM	Tube furnace set to 150
1/7/2013	2:41:55 PM	Helium valve closed
1/7/2013	2:41:55 PM	H2 valve closed
1/7/2013	2:41:55 PM	BCl3 valve closed
1/7/2013	2:41:55 PM	PH3 valve closed
1/7/2013	2:41:55 PM	SiCl4 pre valve closed
1/7/2013	2:41:55 PM	SiCl4 post valve closed
1/7/2013	2:41:55 PM	Bypass valve closed
1/7/2013	2:41:55 PM	Bubbler valve closed
1/7/2013	2:41:55 PM	Main Vac valve opened
1/7/2013	2:41:55 PM	Helium MFC set to  0.000000
1/7/2013	2:41:55 PM	H2 MFC set to  0.000000
1/7/2013	2:41:55 PM	BCl3 MFC set to  0.000000
1/7/2013	2:41:55 PM	PH3 MFC set to  0.000000
1/7/2013	2:41:55 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:41:55 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:41:56 PM	Tube furnace set to 150
1/7/2013	2:42:26 PM	H2 valve closed
1/7/2013	2:42:26 PM	BCl3 valve closed
1/7/2013	2:42:26 PM	PH3 valve closed
1/7/2013	2:42:26 PM	SiCl4 pre valve closed
1/7/2013	2:42:26 PM	SiCl4 post valve closed
1/7/2013	2:42:26 PM	Bypass valve closed
1/7/2013	2:42:26 PM	Bubbler valve closed
1/7/2013	2:42:26 PM	Helium valve opened
1/7/2013	2:42:26 PM	Main Vac valve opened
1/7/2013	2:42:26 PM	Helium MFC set to  20.000000
1/7/2013	2:42:26 PM	H2 MFC set to  0.000000
1/7/2013	2:42:26 PM	BCl3 MFC set to  0.000000
1/7/2013	2:42:26 PM	PH3 MFC set to  0.000000
1/7/2013	2:42:26 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:42:26 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:42:26 PM	Tube furnace set to 150
1/7/2013	2:42:56 PM	Helium valve closed
1/7/2013	2:42:56 PM	H2 valve closed
1/7/2013	2:42:56 PM	BCl3 valve closed
1/7/2013	2:42:56 PM	PH3 valve closed
1/7/2013	2:42:56 PM	SiCl4 pre valve closed
1/7/2013	2:42:56 PM	SiCl4 post valve closed
1/7/2013	2:42:56 PM	Bypass valve closed
1/7/2013	2:42:56 PM	Bubbler valve closed
1/7/2013	2:42:56 PM	Main Vac valve opened
1/7/2013	2:42:56 PM	Helium MFC set to  0.000000
1/7/2013	2:42:56 PM	H2 MFC set to  0.000000
1/7/2013	2:42:56 PM	BCl3 MFC set to  0.000000
1/7/2013	2:42:56 PM	PH3 MFC set to  0.000000
1/7/2013	2:42:56 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:42:56 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:42:56 PM	Tube furnace set to 150
1/7/2013	2:43:26 PM	H2 valve closed
1/7/2013	2:43:26 PM	BCl3 valve closed
1/7/2013	2:43:26 PM	PH3 valve closed
1/7/2013	2:43:26 PM	SiCl4 pre valve closed
1/7/2013	2:43:26 PM	SiCl4 post valve closed
1/7/2013	2:43:26 PM	Bypass valve closed
1/7/2013	2:43:26 PM	Bubbler valve closed
1/7/2013	2:43:26 PM	Helium valve opened
1/7/2013	2:43:26 PM	Main Vac valve opened
1/7/2013	2:43:26 PM	Helium MFC set to  20.000000
1/7/2013	2:43:26 PM	H2 MFC set to  0.000000
1/7/2013	2:43:26 PM	BCl3 MFC set to  0.000000
1/7/2013	2:43:26 PM	PH3 MFC set to  0.000000
1/7/2013	2:43:26 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:43:26 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:43:26 PM	Tube furnace set to 150
1/7/2013	2:43:56 PM	Helium valve closed
1/7/2013	2:43:56 PM	H2 valve closed
1/7/2013	2:43:56 PM	BCl3 valve closed
1/7/2013	2:43:56 PM	PH3 valve closed
1/7/2013	2:43:56 PM	SiCl4 pre valve closed
1/7/2013	2:43:56 PM	SiCl4 post valve closed
1/7/2013	2:43:56 PM	Bypass valve closed
1/7/2013	2:43:56 PM	Bubbler valve closed
1/7/2013	2:43:56 PM	Main Vac valve opened
1/7/2013	2:43:56 PM	Helium MFC set to  0.000000
1/7/2013	2:43:56 PM	H2 MFC set to  0.000000
1/7/2013	2:43:56 PM	BCl3 MFC set to  0.000000
1/7/2013	2:43:56 PM	PH3 MFC set to  0.000000
1/7/2013	2:43:56 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:43:56 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:43:57 PM	Tube furnace set to 150
1/7/2013	2:44:27 PM	H2 valve closed
1/7/2013	2:44:27 PM	BCl3 valve closed
1/7/2013	2:44:27 PM	PH3 valve closed
1/7/2013	2:44:27 PM	SiCl4 pre valve closed
1/7/2013	2:44:27 PM	SiCl4 post valve closed
1/7/2013	2:44:27 PM	Bypass valve closed
1/7/2013	2:44:27 PM	Bubbler valve closed
1/7/2013	2:44:27 PM	Helium valve opened
1/7/2013	2:44:27 PM	Main Vac valve opened
1/7/2013	2:44:27 PM	Helium MFC set to  20.000000
1/7/2013	2:44:27 PM	H2 MFC set to  0.000000
1/7/2013	2:44:27 PM	BCl3 MFC set to  0.000000
1/7/2013	2:44:27 PM	PH3 MFC set to  0.000000
1/7/2013	2:44:27 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:44:27 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:44:27 PM	Tube furnace set to 150
1/7/2013	2:44:57 PM	Helium valve closed
1/7/2013	2:44:57 PM	H2 valve closed
1/7/2013	2:44:57 PM	BCl3 valve closed
1/7/2013	2:44:57 PM	PH3 valve closed
1/7/2013	2:44:57 PM	SiCl4 pre valve closed
1/7/2013	2:44:57 PM	SiCl4 post valve closed
1/7/2013	2:44:57 PM	Bypass valve closed
1/7/2013	2:44:57 PM	Bubbler valve closed
1/7/2013	2:44:57 PM	Main Vac valve opened
1/7/2013	2:44:57 PM	Helium MFC set to  0.000000
1/7/2013	2:44:57 PM	H2 MFC set to  0.000000
1/7/2013	2:44:57 PM	BCl3 MFC set to  0.000000
1/7/2013	2:44:57 PM	PH3 MFC set to  0.000000
1/7/2013	2:44:57 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:44:57 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:44:57 PM	Tube furnace set to 150
1/7/2013	2:45:27 PM	H2 valve closed
1/7/2013	2:45:27 PM	BCl3 valve closed
1/7/2013	2:45:27 PM	PH3 valve closed
1/7/2013	2:45:27 PM	SiCl4 pre valve closed
1/7/2013	2:45:27 PM	SiCl4 post valve closed
1/7/2013	2:45:27 PM	Bypass valve closed
1/7/2013	2:45:27 PM	Bubbler valve closed
1/7/2013	2:45:27 PM	Helium valve opened
1/7/2013	2:45:27 PM	Main Vac valve opened
1/7/2013	2:45:27 PM	Helium MFC set to  20.000000
1/7/2013	2:45:27 PM	H2 MFC set to  0.000000
1/7/2013	2:45:27 PM	BCl3 MFC set to  0.000000
1/7/2013	2:45:27 PM	PH3 MFC set to  0.000000
1/7/2013	2:45:27 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:45:27 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:45:27 PM	Tube furnace set to 150
1/7/2013	2:45:58 PM	Helium valve closed
1/7/2013	2:45:58 PM	H2 valve closed
1/7/2013	2:45:58 PM	BCl3 valve closed
1/7/2013	2:45:58 PM	PH3 valve closed
1/7/2013	2:45:58 PM	SiCl4 pre valve closed
1/7/2013	2:45:58 PM	SiCl4 post valve closed
1/7/2013	2:45:58 PM	Bypass valve closed
1/7/2013	2:45:58 PM	Bubbler valve closed
1/7/2013	2:45:58 PM	Main Vac valve opened
1/7/2013	2:45:58 PM	Helium MFC set to  0.000000
1/7/2013	2:45:58 PM	H2 MFC set to  0.000000
1/7/2013	2:45:58 PM	BCl3 MFC set to  0.000000
1/7/2013	2:45:58 PM	PH3 MFC set to  0.000000
1/7/2013	2:45:58 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:45:58 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:45:58 PM	Tube furnace set to 150
1/7/2013	2:45:59 PM	Run finished at 2:45 PM
1/7/2013	2:47:36 PM	Main Vac valve closed
1/7/2013	2:48:14 PM	Main Vac valve opened
1/7/2013	2:48:39 PM	Recipe started at 2:48 PM
1/7/2013	2:48:39 PM	Helium valve closed
1/7/2013	2:48:39 PM	H2 valve closed
1/7/2013	2:48:39 PM	BCl3 valve closed
1/7/2013	2:48:39 PM	PH3 valve closed
1/7/2013	2:48:39 PM	SiCl4 pre valve closed
1/7/2013	2:48:39 PM	SiCl4 post valve closed
1/7/2013	2:48:39 PM	Main Vac valve closed
1/7/2013	2:48:39 PM	Bypass valve closed
1/7/2013	2:48:39 PM	Bubbler valve closed
1/7/2013	2:48:39 PM	Helium MFC set to  0.000000
1/7/2013	2:48:39 PM	H2 MFC set to  0.000000
1/7/2013	2:48:39 PM	BCl3 MFC set to  0.000000
1/7/2013	2:48:39 PM	PH3 MFC set to  0.000000
1/7/2013	2:48:39 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:48:39 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:48:40 PM	Tube furnace set to 0
1/7/2013	2:48:43 PM	Helium valve closed
1/7/2013	2:48:43 PM	BCl3 valve closed
1/7/2013	2:48:43 PM	PH3 valve closed
1/7/2013	2:48:43 PM	SiCl4 pre valve closed
1/7/2013	2:48:43 PM	SiCl4 post valve closed
1/7/2013	2:48:43 PM	Main Vac valve closed
1/7/2013	2:48:43 PM	Bypass valve closed
1/7/2013	2:48:43 PM	Bubbler valve closed
1/7/2013	2:48:43 PM	H2 valve opened
1/7/2013	2:48:43 PM	Helium MFC set to  0.000000
1/7/2013	2:48:43 PM	H2 MFC set to  500.000000
1/7/2013	2:48:43 PM	BCl3 MFC set to  0.000000
1/7/2013	2:48:43 PM	PH3 MFC set to  0.000000
1/7/2013	2:48:43 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:48:43 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:48:43 PM	Tube furnace set to 0
1/7/2013	2:49:55 PM	Helium valve closed
1/7/2013	2:49:55 PM	BCl3 valve closed
1/7/2013	2:49:55 PM	PH3 valve closed
1/7/2013	2:49:55 PM	SiCl4 pre valve closed
1/7/2013	2:49:55 PM	SiCl4 post valve closed
1/7/2013	2:49:55 PM	Main Vac valve closed
1/7/2013	2:49:55 PM	Bypass valve closed
1/7/2013	2:49:55 PM	H2 valve opened
1/7/2013	2:49:55 PM	Bubbler valve opened
1/7/2013	2:49:55 PM	Helium MFC set to  0.000000
1/7/2013	2:49:55 PM	H2 MFC set to  500.000000
1/7/2013	2:49:55 PM	BCl3 MFC set to  0.000000
1/7/2013	2:49:55 PM	PH3 MFC set to  0.000000
1/7/2013	2:49:55 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:49:55 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:49:56 PM	Tube furnace set to 0
1/7/2013	2:49:57 PM	Helium valve closed
1/7/2013	2:49:57 PM	BCl3 valve closed
1/7/2013	2:49:57 PM	PH3 valve closed
1/7/2013	2:49:57 PM	SiCl4 pre valve closed
1/7/2013	2:49:57 PM	SiCl4 post valve closed
1/7/2013	2:49:57 PM	Main Vac valve closed
1/7/2013	2:49:57 PM	Bypass valve closed
1/7/2013	2:49:57 PM	H2 valve opened
1/7/2013	2:49:57 PM	Bubbler valve opened
1/7/2013	2:49:57 PM	Helium MFC set to  0.000000
1/7/2013	2:49:57 PM	H2 MFC set to  500.000000
1/7/2013	2:49:57 PM	BCl3 MFC set to  0.000000
1/7/2013	2:49:57 PM	PH3 MFC set to  0.000000
1/7/2013	2:49:57 PM	SiCl4 MFC set to  0.000000
1/7/2013	2:49:57 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	2:49:57 PM	Tube furnace set to 1000
1/7/2013	3:09:57 PM	Helium valve closed
1/7/2013	3:09:57 PM	PH3 valve closed
1/7/2013	3:09:57 PM	Main Vac valve closed
1/7/2013	3:09:57 PM	Bypass valve closed
1/7/2013	3:09:57 PM	H2 valve opened
1/7/2013	3:09:57 PM	BCl3 valve opened
1/7/2013	3:09:57 PM	SiCl4 pre valve opened
1/7/2013	3:09:57 PM	SiCl4 post valve opened
1/7/2013	3:09:57 PM	Bubbler valve opened
1/7/2013	3:09:57 PM	Helium MFC set to  0.000000
1/7/2013	3:09:57 PM	H2 MFC set to  500.000000
1/7/2013	3:09:57 PM	BCl3 MFC set to  0.000000
1/7/2013	3:09:57 PM	PH3 MFC set to  20.000000
1/7/2013	3:09:57 PM	SiCl4 MFC set to  50.000000
1/7/2013	3:09:57 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	3:09:57 PM	Tube furnace set to 1000
1/7/2013	3:29:57 PM	Helium valve closed
1/7/2013	3:29:57 PM	BCl3 valve closed
1/7/2013	3:29:57 PM	PH3 valve closed
1/7/2013	3:29:57 PM	SiCl4 pre valve closed
1/7/2013	3:29:57 PM	SiCl4 post valve closed
1/7/2013	3:29:57 PM	Main Vac valve closed
1/7/2013	3:29:57 PM	Bypass valve closed
1/7/2013	3:29:57 PM	H2 valve opened
1/7/2013	3:29:57 PM	Bubbler valve opened
1/7/2013	3:29:57 PM	Helium MFC set to  0.000000
1/7/2013	3:29:57 PM	H2 MFC set to  500.000000
1/7/2013	3:29:57 PM	BCl3 MFC set to  0.000000
1/7/2013	3:29:57 PM	PH3 MFC set to  0.000000
1/7/2013	3:29:57 PM	SiCl4 MFC set to  0.000000
1/7/2013	3:29:57 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	3:29:57 PM	Tube furnace set to 750
1/7/2013	3:34:57 PM	H2 valve closed
1/7/2013	3:34:57 PM	BCl3 valve closed
1/7/2013	3:34:57 PM	PH3 valve closed
1/7/2013	3:34:57 PM	SiCl4 pre valve closed
1/7/2013	3:34:57 PM	SiCl4 post valve closed
1/7/2013	3:34:57 PM	Main Vac valve closed
1/7/2013	3:34:57 PM	Bypass valve closed
1/7/2013	3:34:57 PM	Helium valve opened
1/7/2013	3:34:57 PM	Bubbler valve opened
1/7/2013	3:34:57 PM	Helium MFC set to  500.000000
1/7/2013	3:34:57 PM	H2 MFC set to  0.000000
1/7/2013	3:34:57 PM	BCl3 MFC set to  0.000000
1/7/2013	3:34:57 PM	PH3 MFC set to  0.000000
1/7/2013	3:34:57 PM	SiCl4 MFC set to  0.000000
1/7/2013	3:34:57 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	3:34:58 PM	Tube furnace set to 0
1/7/2013	3:54:58 PM	Helium valve closed
1/7/2013	3:54:58 PM	H2 valve closed
1/7/2013	3:54:58 PM	BCl3 valve closed
1/7/2013	3:54:58 PM	PH3 valve closed
1/7/2013	3:54:58 PM	SiCl4 pre valve closed
1/7/2013	3:54:58 PM	SiCl4 post valve closed
1/7/2013	3:54:58 PM	Main Vac valve closed
1/7/2013	3:54:58 PM	Bypass valve closed
1/7/2013	3:54:58 PM	Bubbler valve closed
1/7/2013	3:54:58 PM	Helium MFC set to  0.000000
1/7/2013	3:54:58 PM	H2 MFC set to  0.000000
1/7/2013	3:54:58 PM	BCl3 MFC set to  0.000000
1/7/2013	3:54:58 PM	PH3 MFC set to  0.000000
1/7/2013	3:54:58 PM	SiCl4 MFC set to  0.000000
1/7/2013	3:54:58 PM	Bypass solenoid MFC set to  0.000000
1/7/2013	3:54:58 PM	Tube furnace set to 0
1/7/2013	3:54:59 PM	Run finished at 3:54 PM
